The 17th International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS) will be held from 14-17, April 2022 (UTC+8) virtually. Dr. Hirai organizes the invited session “Advanced Fabrication Technologies for Nano/Micro Systems,” and present his recent research topic on a fabrication of atomic vapor cells for chip scale atomic clocks (CSAC).
- Conference HP: https://ieee-nems.org/2022/
- Invited session: Advanced Fabrication Technologies for Nano/Micro Systems
Current micro-nano fabrication technology has reached integration levels at which high-performance MEMS devices and sensitive sensors can be fabricated. The scope of this invited session covers new design, fabrication technology, characterization, and applications of devices and systems in micro- and nano-scales. This session is organized five energetic researchers in Japan and highlights recent advances in the field of fabrication technologies and the state of the art in Nano/Micro System applications. - Presentation title: Alkali Metal Vapor Cells Fabricated with Three-Dimensional Microstructuring Technique for Miniature Atomic Clocks