Last Update: April 1, 2024

書籍：Books

  • Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata
    Self-dependent Equivalent Circuit Modeling of Electrostatic Comb Transducers for Integrated MEMS
    VLSI-SoC: The Advanced Research for Systems on Chip, Eds. S. Mir et al., Boston: Springer, 2012, pp.94-109 (Link)
  • Jan G. Korvink, Sadik Hafizovic, Yoshikazu Hirai, Pascal Meyer
    Exposure and Development Simulation for Deep X-ray LIGA
    Advanced Micro and Nanosystems (Volume. 7): LIGA and Its Applications, Eds. V. Saile et al., Weinheim: Wiley-VCH, 2009, pp.103-142, 10.1002/9783527622573.ch5

紀要：Memoirs

  1. Yoshikazu Hirai, Naoki Matsuzuka, Osamu Tabata
    Effective 3-D Process Modeling and Parameters Determination on Double Exposure in Deep X-ray Lithography
    2006 Memoirs of the SR Center Ritsumeikan University, Ritsumeikan University, April, 2006, pp.45-54
  2. Yoshikazu Hirai, Sadik Hafizovic, Naoki Matsuzuka, Jan G. Korvink, Osamu Tabata
    Process Simulation of Moving Mask Deep X-Ray Lithography
    2005 Memoirs of the SR Center Ritsumeikan University, Ritsumeikan University, April, 2005, pp.83-94
  3. Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata
    3-D Microfablication Process by Double Exposure Method in Standard X-ray Lithography
    2004 Memoirs of the SR Center Ritsumeikan University, Ritsumeikan University, April, 2004, pp.93-101

その他：Others

  1. 平井義和
    国際会議報告 The 49th International Conference on Micro and Nano Engineering (MNE 2023)
    IEEJ Trans. SM, 144 (2024), pp.NL4_1, 10.1541/ieejsmas.144.NL4_1 (in Japanese)
  2. 平井義和, 田畑修
    3次元リソグラフィ技術による生体模倣システムの構築
    クリーンテクノロジー, 2023年11月号（Vol.33, No.11）, pp.22-27 (LINK) (in Japanese)
  3. 平井義和
    国際会議報告 EUROSENSORS 2016
    IEEJ Trans. SM, 137 (2017), pp.NL1_1, 10.1541/ieejsmas.137.NL1_1 (in Japanese)
  4. 平井義和
    創薬スクリーニングを目的としたマイクロ流体デバイス
    NanotechJapan Bulletin, 10 (2017) (LINK) (in Japanese)
  5. 平井義和
    研究室だより
    IEEJ Trans. SM, 136 (2016), pp.NL8_3, 10.1541/ieejsmas.136.NL8_3 (in Japanese)
  6. 平井義和
    国際会議報告 IEEE-NEMS2011
    IEEJ Trans. SM, 131 (2011), pp.NL7_1, 10.1541/ieejsmas.131.NL7_1 (in Japanese)