Last Update: May 14, 2024

国際学会

2024

  1. Ryo Murakami, Shun Kiyose, Yoshikazu Hirai
    Smaller Footprint of Alkali-metal Vapor Cells With Microfabricated On-chip Dispensing Component
    The 37th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2024), Austin, TX USA (January, 2024), M81-i (Open poster)
  2. Yusuke Asagoe, Hirofumi Shimizu, Yoshikazu Hirai
    Microfluidic Device for Diffracted X-ray Tracking Method to Measure the Conformational Change of Ion Channel in Response to Chemical Stimuli
    The 19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2024), Kyoto, JAPAN (May, 2024), accepted
  3. Haruki Goda, Naoyuki Ishida, Kozo Furuta, Kazuhiko Izui, Fred van Keulen, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata, Yoshikazu Hirai
    Topology-Optimized Electrode Design for Accurate TEER Measurements in Microfluidic Organ-on-a-Chip Devices
    The Microphysiological Systems World Summit 2024 (MPS 2024), Seattle, WA USA (June, 2024), accepted

2023

  1. (Key note) Osamu Tabata, Ken-ichiro Kamei, Yoshikazu Hirai
    Micro Physiological System: A Way to Mimic a Body on a Chip
    2023 7th International Conference on Materials Engineering and Nano Sciences (ICMENS 2023), Chiba, JAPAN (April, 2023)
  2. (Invited) Yoshikazu Hirai
    Microfabrication Technology for Diffracted X-ray Tracking Method to Observe Ion-Channel Gating Motions
    The 3rd MRCE International Conference on: Materials Engineering and Nanotechnology (3rd MRCE- ME&N 2023), Hurghada, EGYPT (April, 2023)
  3. Jiandong Yang, Yoshikazu Hirai, Ken-ichiro Kamei, Osamu Tabata, Toshiyuki Tsuchiya
    Simulation Model to Characterize Volumetric Flow Rate Generated by Polydimethylsiloxane Peristaltic Micropump for Body-on-a-Chip
    The 18th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2023), Jeju, KOREA (May, 2023), pp. 714-715
  4. Kentaro Kotoya, Ikkei Yamauchi, Hirofumi Shimizu, Yoshikazu Hirai
    Microfluidic-Based Diffracted X-ray Tracking Method for Real-Time Observation of Ion Channel Twist Motion Under Sequential Chemical Stimuli
    The 22nd International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2023), Kyoto, JAPAN (June, 2023), pp.757-760
  5. Haruki Goda, Naoyuki Ishida, Kozo Furuta, Kazuhiko Izui, Fred van Keulen, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata, Yoshikazu Hirai
    Electrode Design Using Multi-Material Topology Optimization for Accurate Measurement of Trans-Epithelial Electrical Resistance in Organ-on-a-Chip
    The 49th International Conference on Micro- and Nano Engineering (MNE 2023), Berlin, GERMANY (September, 2023), pp. 661-662
  6. Yusuke Asagoe, Hirofumi Shimizu, Yoshikazu Hirai
    Microfluidic-based Diffracted X-ray Tracking Method for Precise Recording of Ion Channel Motion in Response to Sequential Chemical Solution Changes
    The 27th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2023), Katowice, POLAND (October, 2023), 4C1-4
  7. Taiichi Shikama, Takato Watanabe, Masaya Zetsu, Yoshikazu Hirai, Mazin Jouda, Masahiro Hasuo
    Accuracy Estimation of All-Optical Thermometry Between 283–373 K using the NV-Center Zero-Phonon Line Spectrum of Diamond Microparticles
    The 2023 MRS Fall Meeting and Exhibit, Boston, MA USA (November, 2023), EL14.12.02

2022

  1. Takahirio Mizumoto, Yoshikazu Hirai, Amit Banerjee, Toshiyuki Tsuchiya
    MEMS Reservoir Computing Using Frequency Modulated Accelerometer
    The 35th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2022), Hybrid-Tokyo, JAPAN (January, 2022), pp.487-490, 10.1109/MEMS51670.2022.9699777
  2. Masaki Shimofuri, Yoshikazu Hirai, Amit Banerjee, Toshiyuki Tsuchiya
    Observation of Pull-in by Casimir Force in MEMS-Controlled Nanogap Fabricated by Silicon Cleavage
    The 35th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2022), Hybrid-Tokyo, JAPAN (January, 2022), pp.511-514, 10.1109/MEMS51670.2022.9699645
  3. (Invited) Yoshikazu Hirai
    Alkali Metal Vapor Cells Fabricated with Three-Dimensional Microstructuring Technique for Miniature Atomic Clocks
    The 17th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2022), Online (April, 2022), pp.20
  4. Wei Yu, Amit Banerjee, Yoshikazu Hirai, Jun Hirotani, Toshiyuki Tsuchiya
    Ultrathin Si NEMS Resonators for Gas Sensing with Ultrahigh Sensitivity
    The 17th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2022), Online (April, 2022), pp.72-73
  5. (Key note) Osamu Tabata, Ken-ichiro Kamei, Yoshikazu Hirai
    Micro Physiological System: A Way to Mimic a Body on a Chip
    The 9th International Conference on Mechanics, Materials and Manufacturing (ICMMM 2022), Hybrid-Laurel, MD USA (August, 2022)

2021

  1. Takashi Miyazaki, Jiandong Yang, Satoshi Imamura, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Highly Accurate Measurement of Trans-Epithelial Electrical Resistance in Organ-on-a-Chip
    The 34th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021), Online (January, 2021), pp.411-414, 10.1109/MEMS51782.2021.9375164
  2. Jiandong Yang, Satoshi Imamura, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Multilayered Microfluidic Device for Controllable Flow Perfusion of Gut-Liver on a Chip
    The 21st International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2021), Online (June, 2021), pp.176-179, 10.1109/Transducers50396.2021.9495477
  3. Toshiyuki Tsuchiya, Toshiki Ema, Yoshikazu Hirai, Christopher Welham, Hideyuki Maekoba
    Gravity and Film Stress Analysis for MEMS Deformable Mirror with Electrostatic Piston Array
    The 21st International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2021), Online (June, 2021), pp.483-486, 10.1109/Transducers50396.2021.9495655
  4. Shun Kiyose, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
    Microfabricated Alkali Metal Vapor Cells Filled With an On-Chip Dispensing Component
    The 21st International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2021), Online (June, 2021), B6-JI1A1 (*Just-In Press Presentations)
  5. Masaki Shimofuri, Yoshikazu Hirai, Amit Banerjee, Toshiyuki Tsuchiya
    SOI-MEMS Device for Fabrication and Physical Properties Measurement of Single-Crystal Silicon Nanogap with (111) Cleavage Plane Surfaces
    The 34th International Microprocesses and Nanotechnology Conference (MNC 2021), Online (October, 2021), 29C-3-1

2020

  1. Tomoya Nakamura, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
    Electrostatic Micro Mirror Array with Batch-Fabricated Torsion Beam of Silicon Nanowire
    The 33rd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2020), Vancouver, Canada (January 2020), pp.1157-1160, 10.1109/MEMS46641.2020.9056252
  2. Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya
    Scale-Factor Analysis of a Geometrically Compensated (100) Single-Crystal Silicon Vibratory Ring Gyroscope
    The 7th IEEE International Symposium on Inertial Sensors and Systems (IEEE INERTIAL 2020), Hiroshima, Japan, (March, 2020), 10.1109/INERTIAL48129.2020.9090073ct
  3. (Invited) Yoshikazu Hirai
    Microfluidic Platform Fabricated by Three-Dimensional Lithography Enables Drug Test and Disease Modeling in vitro
    The 15th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2020), Online (September, 2020), pp.360
  4. Dongxiao Zhang, Yoshikazu Hirai, Ken-ichiro Kamei, Osamu Tabata, Toshiyuki Tsuchiya
    Heart-Liver on a Chip Integrated with a Microelectrode Array to Monitor Extracellular Field Potentials of Cardiomyocytes
    The 24th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2020), Online (October 2020), pp.941-942
  5. Shun Kiyose, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
    Microfabricated Vapor Cells with Monolithically Integrated Alkali Metal Dispensing Component
    The 33rd International Microprocesses and Nanotechnology Conference (MNC 2020), Online (Nobember, 2020), 2020-5-8
  6. Yuanlin Xia, Yoshikazu Hirai, Toshiyuki Tsuchiya
    Tensile Strength of Single-Crystal Silicon Microstructure with Stepwise Bias-Graded a-C:H Coating
    The 33rd International Microprocesses and Nanotechnology Conference (MNC 2020), Online (Nobember, 2020), 2020-5-22
  7. Jiandong Yang, Yoshikazu Hirai, Ken-ichiro Kamei, Marika Trumm, Toshiyuki Tsuchiya, Osamu Tabata
    In Vitro Modeling of Non-Alcoholic Fatty Liver Disease by Integrated Gut-Liver on a Chip
    The 2020 MRS Spring/Fall Meeting and Exhibit, Online (December, 2020), S.SM01.02.02

2019

  1. Katsuo Nakamura, Yuichi Kimoto, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Microfabrication of Alkali Vapor Cells with Lower the Outgassing and Temperature Utilizing Silicon 3D Structure
    The 32nd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2019), Seoul, Korea (January 2019), pp.350-353, 10.1109/MEMSYS.2019.8870676
  2. Naoki Yamashita, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Surface-Enhanced Raman Spectroscopy with Gold Nanoparticle Dimers Created by Sacrificial DNA Origami Technique
    The 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2019), Bangkok, Thailand (April, 2019), pp.322-323
  3. Yusuke Tsuji, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Characterization of Ionic Liquid-Based Pressure Sensor Fabricated by Grayscale Lithography
    The 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2019), Bangkok, Thailand (April, 2019), pp.409-411
  4. Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Optimazation of Suspending Beams for Mode-Matching of (100) Single-Crystal Silicon Vibratory Ring Gyroscope
    The 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2019), Bangkok, Thailand (April, 2019), SuPo1.11
  5. Ikkei Yamauchi, Tomoki Tabuchi, Yoshikazu Hirai, Masayuki Iwamoto, Toshiyuki Tsuchiya, Hirofumi Shimizu, Osamu Tabata
    Microfabricated Solution Chamber for High Resolution Diffracted X-ray Tracking Method to Observe Ion-Channel Gating Motions
    The 20th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2019), Berlin, Germany (June, 2019), pp.25-28, 10.1109/TRANSDUCERS.2019.8808206
    【Outstanding Paper Award Finalists (Oral Category)】
  6. Masaki Shimofuri, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Temperature Difference Measurement Acrorss MEMS Based Nanogap Created by Cleavage of Silicon for Thermionic Generation
    The 20th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2019), Berlin, Germany (June, 2019), pp.1483-1486, 10.1109/TRANSDUCERS.2019.8808783
  7. Yuki Yamazaki, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Parallel Tensile-mode Testing of Single Crystal Silicon By Specimen Integrating Shear Strain Gauge
    The 45th International Conference on Micro & Nano Engineering (MNE 2019), Rhodes, Greece (September, 2019), PC133
  8. Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Vacuum Emission in MEMS Fracture Fabricated, Gap-Controlled Si Nano Electrodes
    The 32nd International Microprocesses and Nanotechnology Conference (MNC 2019), Hiroshima, Japan (October, 2019), 31P-8-26
  9. Jiandong Yang, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Integrated Gut-Liver on a Chip for Modelling Non-Alcoholic Fatty Liver Disease in vitro
    The 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2019), Basel, Switzerland (October 2019), pp.376-377
  10. (Invited) Yoshikazu Hirai
    PDMS-integratable Ionic Liquid-based Pressure Sensor for Microphysiological Systems
    The 5th International Conference on Advanced Electromaterials (ICAE 2019), Jeju, Korea (November 2019), 13-0241
  11. (Invited) Yoshikazu Hirai
    Microfabricated Observation Chamber for Diffracted X-ray Tracking Method to Capture Ion-Channel Gating Motion at Time-Lapse Images
    The 13th IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2019), Gwangju, Korea (November 2019), SS17.4

2018

  1. Yoshikazu Hirai, Yusuke Tsuji, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Improved Sensitivity of Ionic Liquid-Based Pressure Sensor for Body-on-a-Chip using Simulation-Based 3D Lithography
    The 31st IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2018), Belfast, United Kingdom (January 2018), pp.511-514, 10.1109/MEMSYS.2018.8346602
  2. Akiko Uno, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
    Zernike Generation with MEMS Deformable Mirror Actuated by Electrostatic Piston Array
    The 31st IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2018), Belfast, United Kingdom (January 2018), pp.704-707, 10.1109/MEMSYS.2018.8346652
  3. Shu Yunyi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Geometrical Compensation of (100) Single-Crystal Silicon Mode-Matched Vibratory Ring Gyroscope
    The 5th IEEE International Symposium on Inertial Sensors and Systems (IEEE INERTIAL 2018), Lake Como, Italy (March 2018), P1-14, 10.1109/ISISS.2018.8358156
  4. Yoshikazu Hirai, Katsuo Nakamura, Yuichi Kimoto, Toshiyuki Tsuchiya, Osamu Tabata
    Alkali Metal Dispenser Utilizing Scalloped Silicon Groove for Microfabricated Vapor Cells
    The 2018 IEEE International Frequency Control Symposium (IFCS 2018), Olympic Valley, CA USA (May 2018), ThP27, 10.1109/FCS.2018.8597572
  5. Yoshikazu Hirai, Katsuo Nakamura, Yuichi Kimoto, Toshiyuki Tsuchiya, Osamu Tabata
    Low-temperature Alkali Metal Production Utilizing Scalloped Silicon Grooves For Microfabricated Alkali Vapor Cells
    The 9th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2018), Hong Kong (June 2018), 94
  6. Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Vacuum Emission in Large-Area Nanogap Fabricated by MEMS Controlled Cleavage of Single Crystal Silicon
    The 31st International Vacuum Nanoelectronics Conference (IVNC 2018), Kyoto, Japan (July 2018), O9-2, 10.1109/IVNC.2018.8520283
  7. Yoshikazu Hirai, Yasuaki Mori, Tomoki Tabuchi, Hirofumi Shimizu, Toshiyuki Tsuchiya, Osamu Tabata
    Microchannel Fabrication using a Photo Patternable Adhesive Material for Recording Conformational Changes of KcsA Channel with the Diffracted X-ray Tracking Method
    The EUROSENSORS 2018, Graz, Austria (September 2018), P45, 10.3390/proceedings2130972
  8. Jiaxu Wu, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Fluidic-Capacitor Integrated Microfluidic Platform to Mimic Heart Beating for Generation of Functional Liver Organoids
    The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2018), Kaohsiung, Taiwan (November 2018), pp.1718-1721
  9. (Invited) Yoshikazu Hirai
    Three Dimensional UV Lithography Technologies for Microphysiological Systems
    The 31st International Microprocesses and Nanotechnology Conference (MNC 2018), Sapporo, Japan (November, 2018)
  10. Shu Yunyi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Geometrical Compensation for Mode-Matching of (100) Silicon Ring Resonator for Vibratory Gyroscope
    The 31st International Microprocesses and Nanotechnology Conference (MNC 2018), Sapporo, Japan (November, 2018), 14B-3-1
  11. Wenlei Zhang, Kazutaka Obitani, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Fracture Strength of a Silicon Torsional Mirror Resonator Fully Coated with Submicrometer-Thick PECVD DLC Film
    The 31st International Microprocesses and Nanotechnology Conference (MNC 2018), Sapporo, Japan (November, 2018), 15D-4-3
  12. Masaki Shimofuri, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Non-Contact Temperature Difference Measurement of Cleavage Plane Nanogap Electrodes with Large Surface Area
    The 2018 MRS Fall Meeting and Exhibit, Boston, MA USA (November, 2018), TP02.07.04
  13. Yusuke Tsuji, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Improvement Performance of Ionic Liquid-Based Pressure Sensor for Integration Into Body-on-a-Chip
    The 2018 MRS Fall Meeting and Exhibit, Boston, MA USA (November, 2018), BM05.06.03

2017

  1. Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Tensile Properties of Single-Crystal-Silicon Fully Coated with Submicrometer-Thick PECVD DLC
    The 30th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2017), Las Vegas, NV USA (January 2017), pp.732-735, 10.1109/MEMSYS.2017.7863512
  2. (Invited) Yoshikazu Hirai, Ken-ichiro Kamei, Osamu Tabata
    Body-on-a-Chip: an application of 3-D microstructuring techniques
    The 9th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials / The 10th International Conference on Plasma-Nano Technology & Science (ISPlasma 2017 /IC-PLANTS 2017), Nagoya, Japan, (March, 2017), 03aE06I
  3. (Invited) Ken-ichiro Kamei, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Integrated Heart/Cancer on a Chip: Towards Recapitulation of Side Effects
    The 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2017), Los Angeles, CA USA (April, 2017).
  4. Naoki Yamashita, Zhipeng Ma, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Formation of Gold Nanoparticle Dimers on Silicon by Sacrificial DNA Origami Technique
    The 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2017), Los Angeles, CA USA (April 2017), pp.710-713, 10.1109/NEMS.2017.8017119
  5. Yoshikazu Hirai, Kenta Terashima, Katsuo Nakamura, Toshiyuki Tsuchiya, Osamu Tabata
    Low Temperature, Wafer-Level Process of Alkali-Metal Vapor Cells for Micro-Fabricated Atomic Clocks
    The 19th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2017), Kaohsiung, Taiwan (June, 2017), pp.431-434, 10.1109/TRANSDUCERS.2017.7994079
  6. Toshiyuki Tsuchiya, Yuki Matsui, Yoshikazu Hirai, Osamu Tabata
    Thermomechanical Noise of Arrayed Capacitive Accelerometers with 300-nm Gap Sensing Electrodes
    The 19th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2017), Kaohsiung, Taiwan (June, 2017), pp.1002-1005, 10.1109/TRANSDUCERS.2017.7994220
  7. Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    MEMS Based Fabrication of Conformal Electrode Pairs for Thermotunneling Cooling
    The 2017 International Meeting for Future of Electron Devices, Kansai (IMFEDK 2017), Kyoto, Japan (June, 2017), pp.106-107, 10.1109/IMFEDK.2017.7998065
  8. Kenta Terashima, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Microfabrication of Cs-Filled MEMS Cell Using Sequential Plasma Activated Bonding
    The 31st European Frequency and Time Forum and the 71st consecutive meeting of the IEEE International Frequency Control Symposium (EFTF-IFCS 2017), Besançon, France (July, 2017), pp.60-62, 10.1109/FCS.2017.8088800
  9. Tatsuya Omaki, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Microfabrication of Embedding a Flexible Parylene-Based Microelectrode Array within Body-on-a-Chip
    The 31st EUROSENSORS (EUROSENSORS 2017), Paris, France (September, 2017), T-MN-305-1153, 10.3390/proceedings1040302
  10. Yuto Yamaki, Yuki Sato, Takayuki Yamada, Kazuhiro Izui, Shinji Nishiwaki, Yoshikazu Hirai, Osamu Tabata
    Deformable Mirror Design Based on Current Value Optimization and Actuator Reduction
    International Conference on Evolutionary and Deterministic Methods for Design Optimization and Control with Applications to Industrial and Societal Problems (EUROGEN 2017), Madrid, Spain (September, 2017), 042
  11. Toshiyuki Tsuchiya, Yuki Matsui, Yoshikazu Hirai, Osamu Tabata
    Bidirectional Hysteresis in Frequency Response of Arrayed Electrostatic MEMS Resonator
    The 30th International Microprocesses and Nanotechnology Conference (MNC 2017), Jeju, Korea (November, 2017), 8P-7-84
  12. Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Tensile Properties of Single Crystal Silicon Microstructure Fully-Coated by Plasma CVD Diamond-Like Carbon with Different Substrate Bias Voltages
    The 2017 MRS Fall Meeting and Exhibit, Boston, MA USA (November, 2017), EM06.05.04
  13. Amit Banerjee, Yasuaki Mori, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    A MEMS Based Approach for Fabricating Conformal Nanogap Electrodes for Thermotunneling Energy Harvesting Applications
    The 2017 MRS Fall Meeting and Exhibit, Boston, MA USA (November, 2017), ES09.03.28

2016

  1. Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Mechanical Stability for the Connections of DNA Origami Using Anti-Parallel/Parallel Double Crossovers
    The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (April 2016), A1L-C-5
  2. Seongsu Park, Zhipeng Ma, Naoki Yamashita, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    A Multibody Brownian Dynamics for Modeling Size-Separation of dsDNA Fragment and DNA Origami Tiles in Anisotropic Nanosieving Array
    The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (April 2016), B1L-D-4
  3. Kanji Yasuda, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Design Optimization of Integrated Shear Strain Gauge for Single-Crystal-Silicon Parallel Tensile-Testing Device
    The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (April 2016), B3P-B-53
  4. Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Electromechanical Fabrication of Conformal Nanogap Electrodes for Thermotunneling Cooling
    The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (April 2016), B3P-B-61
  5. Toshiyuki Tsuchiya, Tetsuya Hemmi, Jun-ya Suzuki, Yoshikazu Hirai, Osamu Tabata
    Tensile Fracture of Integrated Single-Crystal Silicon Nanowire using MEMS Electrostatic Testing Device
    The 21st European Conference on Fracture (ECF 21), Catania, Italy (June, 2016), 3.1.4, 10.1016/j.prostr.2016.06.178
  6. Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Effect of Crystallographic Orientations on Fractures and Slip Occurrences at 500 °C of (110) Single Crystal Silicon Microstructures
    The 21st European Conference on Fracture (ECF 21), Catania, Italy (June, 2016), 3.1.6, 10.1016/j.prostr.2016.06.179
  7. Akiko Uno, Vijay Kumar Singh, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Fabrication of MEMS Deformable Mirror Actuated by Electrostatic Piston Array
    The 8th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2016), Kanazawa, Japan (June, 2016), pp.113-114
  8. Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    MEMS Deformable Mirror Actuated By Electrostatic Piston Array
    The 2016 International Conference on Optical MEMS and Nanophotonics (OMN 2016), Singapore (July, 2016), pp.55-56, 10.1109/OMN.2016.7565822
  9. Kio Tahara, Yoshikazu Hirai, Hirofumi Shimizu, Toshiyuki Tsuchiya, Osamu Tabata
    Photoresist Micro-Chamber for the Diffracted X-ray Tracking Method Recording Single-Molecule Conformational Changes
    The 30th EUROSENSORS (EUROSENSORS 2016), Budapest, Hungary (September, 2016), WL.FLU-10-8363, 10.1016/j.proeng.2016.11.389
  10. Katsuo Nakamura, Florian Larramendy, Yoshikazu Hirai, Toshiyuki Tsuchiya, Oliver Paul, Osamu Tabata
    Simulation Study of SU-8 Structures Realized by Single-Step Projection Photolithography
    The 15th IEEE SENSORS Conference (IEEE SENSORS 2016), Orland, FL USA (October, 2016), pp.139-141, 10.1109/ICSENS.2016.7808444
  11. (Invited) Ken-ichiro Kamei, Yoshiki Kato, Yoshikazu Hirai, Toshiyuki Tsuchiya, Yong Chen, Osamu Tabata
    Integrated Heart/Cancer on a Chip: Towards in vitro recapitulation of side effects of anti-cancer drugs
    The 10th IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE NANOMED 2016), Macau SAR, China (October, 2016)
  12. Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Radial Mechanical Property of a Crossover Density-Varied DNA Nanotube
    The 29th International Microprocesses and Nanotechnology Conference (MNC 2016), Kyoto, Japan (November, 2016), 9B-2-2
  13. Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Tensile Test of a Silicon Microstructure Fully Coated with Submicrometer-Thick DLC Film Using PECVD Method
    The 29th International Microprocesses and Nanotechnology Conference (MNC 2016), Kyoto, Japan (November, 2016), 9D-2-4
  14. Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    MEMS Fabricated Conformal Electrodes Attempting Thermotunneling Refrigeration
    The 29th International Microprocesses and Nanotechnology Conference (MNC 2016), Kyoto, Japan (November, 2016), 11C-10-5
  15. Seongsu Park, Sung Hee, Zhipeng Ma, Jongyoon Han, Toshiyuki Tsuchiya, Yoshikazu Hirai, Osamu Tabata
    On-Chip Separation of Triangular and Cylindrical DNA Origami Nanostructures Using Slanted Nanofilter Array
    The 2016 Annual Meeting of the AES Electrophoresis Society, San Francisco, CA USA (November, 2016), 251s
  16. (Invited) Ken-ichiro Kamei, Yoshiki Kato, Yoshikazu Hirai, Toshiyuki Tsuchiya, Yong Chen, Osamu Tabata
    Body on a Chip Towards Understanding of the Side Effects of Anti-Cancer Drug in Vitro
    The 29th Annual and International Meeting of Japanese Association for Animal Cell Technology (JAACT), Kobe, Japan (November, 2016)
  17. Yu Nakano, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Design and Fabrication of Ionic Liquid-Based Pressure Sensor for Evaluation of Vascularization of Micro-Tissues
    International Symposium on Micro-Nano Science and Technology 2016 (MNST 2016), Tokyo, Japan (December, 2016), SaA1-B-1
  18. Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Effect of Tensile Orientation on Slip and Fracture of (110) Silicon at High Temperature
    International Symposium on Micro-Nano Science and Technology 2016 (MNST 2016), Tokyo, Japan (December, 2016), SuA1-A-2
  19. Kanji Yasuda, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Integrated Shear Strain Gauge for Parallel Tensile-Mode Fatigue Testing Device
    International Symposium on Micro-Nano Science and Technology 2016 (MNST 2016), Tokyo, Japan (December, 2016), SuA1-A-8

2015

  1. Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Size Effect on Brittle-Ductile Transition on Temperature of Silicon by Means of Tensile Testing
    The 28th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2015), Estoril, Portugal (January, 2015), pp.389-382, 10.1109/MEMSYS.2015.7050971
  2. Kosuke Hokazono, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    FET Properties of Single-Walled Carbon Nanotubes Individually Assembled utilizing Single Strand DNA
    The 28th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2015), Estoril, Portugal (January, 2015), pp.417-420, 10.1109/MEMSYS.2015.7050978
  3. Xiaoxu Ma, Yoshiki Kato, Yoshikazu Hirai, Floris van Kempen, Fred van Keulen, Toshiyuki Tsuchiya, Osamu Tabata
    Optimization Method for 3D Lithography Process Utilizing DMD-Based Maskless Grayscale Photolithography System
    Optical Microlithography XXVIII (Conference 9426), SPIE Advanced Lithography 2015, San Jose, CA USA (February, 2015), 9426-14, 10.1117/12.2084486
  4. Zhipeng Ma, Young-Joo Kim, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Do-Nyum Kim, Osamu Tabata
    Direct Characterization of Radial Modulus of DNA Nanotube by AFM Nanoindentation
    The 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2015), Xi’an, China (April, 2015), pp.581-584, 10.1109/NEMS.2015.7147496
  5. Kazuhiro Ban, Kazuya Tsujimoto, Yoshikazu Hirai, Akira Terao, Natsuhiko Mizutani, Tetsuo Kobayashi, Osamu Tabata
    Alkali Metal Source Tablet for Vapor Cells of Atomic Magnetometers
    The 2015 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCF-EFTF 2015), Denver, CO USA (April, 2015), pp.174-179, 10.1109/FCS.2015.7138817
  6. Yoto Mori, Zhipeng Ma, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Selective Assembly of DNA Nanostructure Bridging Onto a Trenched Silicon Substrate
    The 18th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2015), Anchorage, AK USA (June, 2015), pp.1389-1392, 10.1109/TRANSDUCERS.2015.7181192
  7. Yoshiki Kato, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Microfluidic Device to Interconnect Multiple Organs via Fluidic Circulation: Towards Body-on-a-Chip
    The 18th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2015), Anchorage, AK USA (June, 2015), pp.1549-1552, 10.1109/TRANSDUCERS.2015.7181233
  8. Yuki Matsui, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    A Sub-Micron-Gap SOI Capacitive Accelerometer Array utilizing Size Effect
    The 18th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2015), Anchorage, AK USA (June, 2015), pp.2212-2215, 10.1109/TRANSDUCERS.2015.7181400
  9. Xiaoxu Ma, Yoshiki Kato, Floris van Kempen, Yoshikazu Hirai, Toshiyuki Tsuchiya, Fred van Keulen, Osamu Tabata
    Multiple Patterning with Process Optimization Method for Maskless DMD-Based Grayscale Lithography
    The 29th EUROSENSORS (EUROSENSORS 2015), Freiburg, Germany (September, 2015), pp.1091-1094, 10.1016/j.proeng.2015.08.778
  10. Tetsuya Henmi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Batch Integration Process of A Free-Standing Silicon Nanowire to MEMS
    The 26th Micromechanics and Microsystems Europe workshop (MME 2015), Toledo, Spain (September, 2015), Paper No. B6, p.29
  11. Zhipeng Ma, Naoki Yamashita, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Programmable Polymerization of DNA Origami Structures with Double Crossovers Connection
    The 28th International Microprocesses and Nanotechnology Conference (MNC 2015), Toyama, Japan (November, 2015), 12-P-7-77
  12. Seongsu Park, Zhipeng Ma, Naoki Yamashita, Kentaro Kawai, D.-N. Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    A Constrained Rigid Body Brownian Dynamics Simulation for On-Chip Size-Separation of Cross-linked DNA Origami Tiles
    The 28th International Microprocesses and Nanotechnology Conference (MNC 2015), Toyama, Japan (November, 2015), 13P-11-118L
  13. Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Parallel Tensile-Mode Fatigue Testing of Silicon Microstructures with Integrated Piezoresistive Stain Sensors
    The 28th International Microprocesses and Nanotechnology Conference (MNC 2015), Toyama, Japan (November, 2015), 13P-11-124L

2014

  1. Akio Uesugi, Takahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Brittle-Ductile Transition of Single Crystal Silicon Micro Structure under Tensile Stress Below 600 °C
    The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), Daegu, Korea (June, 2014), 3-1
  2. Xiaoxu Ma, Yoshiki Kato, Yoshikazu Hirai, Floris van Kempen, Fred van Keulen, Toshiyuki Tsuchiya, Osamu Tabata
    An Optimization Approach for 3D Photolithography utilizing DMD Maskless Exposure System
    The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), Daegu, Korea (June, 2014), 6-1
  3. Yusuke Kogita, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
    Double-Side-Drive Electrostatic Optical Chopper for Time-Resolved Raman Spectroscopy
    The 2014 International Conference on Optical MEMS and Nanophotonics (OMN 2014), Glasgow, Scotland (August, 2014), pp.65-66, 10.1109/OMN.2014.6924545
  4. Toshiyuki Tsuchiya, Vijay Kumar Singh, Yoshikazu Hirai, Osamu Tabata
    Large-Displacement Electrostatic Deformable Mirror with Movable Bottom Electrodes
    The 2014 International Conference on Optical MEMS and Nanophotonics (OMN 2014), Glasgow, Scotland (August, 2014), pp.119-120, 10.1109/OMN.2014.6924549
  5. Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata
    Photoresist-Based Microfluidic Cell Sorter for Photodynamic Urine Diagnosis
    The 28th EUROSENSORS (EUROSENSORS 2014), Brescia, Italy (September, 2014), pp.62-65, 10.1016/j.proeng.2014.11.266
  6. Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Tensile Testing in Vacuum with Concentrated Infrared Light Heating for Single Crystal Silicon Mechanical Characterization at High Temperature
    The 27th International Microprocesses and Nanotechnology Conference (MNC 2014), Fukuoka, Japan (November, 2014), 6C-5-1

2013

  1. Toshiyuki Akishiba, Naoyuki Tamura, Takashi Ichii, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Hiroyuki Sugimura, Osamu Tabata
    DNA Origami Assembly on Patterned Silicon by AFM Based Lithography
    The 26th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2013), Taipei, Taiwan (January, 2013), pp.307-310, 10.1109/MEMSYS.2013.6474239
    【Recieved the “Outstanding Paper Awards”】
  2. Atsushi Nakano, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Akira Umeda
    Rotational Motion Effect on Sensitivity Matrix of MEMS Three-Axis Accelerometer for Realization of Concurrent Calibration using Vibration Table
    The 26th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2013), Taipei, Taiwan (January, 2013), pp.645-648, 10.1109/MEMSYS.2013.6474324
  3. Yoshiki Kato, Yoshikazu Hirai, Floris van Kempen, Fred van Keulen, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Novel Process Optimization Approach for DMD-based Grayscale 3D Microstructuring Photolithography
    The 10th International Workshop on High Aspect Ratio Micro and Nano System Technology (HARMNST 2013), Berlin, Germany (April, 2013), pp.192-193
  4. Floris van Kempen, Yoshikazu Hirai, Fred van Keulen, Osamu Tabata
    Automatic Process Design for 3D Thick-Film Grayscale Photolithography
    The 17th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2013), Barcelona, Spain (June, 2013), pp.1625-1628, 10.1109/Transducers.2013.6627095
  5. Koji Sugano, Hiroshi Katayama, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    SERS Characterization Based on Silver Nanoparticle Dimer in Microfluidic Laminar Flow for Molecule Trace Detection
    The 17th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2013), Barcelona, Spain (June, 2013), pp.1807-1810, 10.1109/Transducers.2013.6627140
  6. Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Effect of Surface Morphology and Crystal Orientations on Fracture Strength of Thin Film (110) Single Crystal Silicon
    The 17th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2013), Barcelona, Spain (June, 2013), pp.1946-1949, 10.1109/Transducers.2013.6627175
  7. Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Fractography Analysis Of Tensile Tested (110) Silicon Prepared by Different Surface Morphology And Crystal Orientations
    ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK 2013), Burlingame, CA USA (July, 2013), IPACK2013-73271
  8. Daisuke Takagi, Yoshikazu Hirai, Satoshi Anai, Yoshitomo Chihara, Kiyohide Fujimoto, Toshiyuki Tsuchiya, Yoshihiko Hirao, Osamu Tabata
    Microfluidic Cell Sorter for Photodynamic Urine Diagnosis
    The 7th IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2013), Phuket, Thailand (November, 2013), pp.22-26, 10.1109/NANOMED.2013.6766309

2012

  1. Akio Kitamura, Yoshikazu Hirai, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya
    Are Nonliner Resonators Suitable for Energy Harvesting? – Equivalent Circuit Analysis of Nonlinear Response of MEMS Resonator
    The 25th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2012), Paris, France (January, 2012), pp.1213-1216, 10.1109/MEMSYS.2012.6170407
  2. Tatsuya Kataoka, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Tensile Testing of SWCNT using Thermal Actuator Clamped with Electrolessly Deposited Gold Layer
    The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (March, 2012), pp.335-336
  3. Chunmei Huang, Toshiyuki Akishiba, Naoyuki Tamura, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Temperature Dependency of DNA Origami Self-Assembly Rate
    The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (March, 2012), pp.411-412
  4. Ken-Ichiro Kamei, Yoshikazu Hirai, Yoshihide Makino, Li Liu, Qinghua Yuan, Yong Chen, Osamu Tabata
    Evaluation of Negative Photoresists on Phenotypes of Human Induced Pluripotent Stem Cells (hiPSCs)
    The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (March, 2012), pp.558-559
  5. So Nishino, Yoshiko Takenaka, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Fabrication of Nanogap Electrodes by Gold Nanorod Growth on Substrate
    The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (March, 2012), pp.652-653
  6. Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Modeling and Elastic Property Simulation of Epoxy-Based Negative Photoresist using Coarse-Grained Molecular Dynamics
    The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (March, 2012), pp.999-1000
  7. Ken-Ichiro Kamei, Yoshikazu Hirai, Yoshihide Makino, Li Liu, Qinghua Yuan, Yong Chen, Osamu Tabata
    Phenotypic Modulation of Pluripotent Stem Cells by Microfabrication Materials
    The International Society for Stem Cell Research (ISSCR) 10th Annual Meeting, Yokohama, Japan (June, 2012), T-2262
  8. Floris van Kempen, Yoshikazu Hirai, Fred van Keulen, Osamu Tabata
    Optimization Techniques for Gray-Scale Photolithography
    The 9th ASMO UK / ISSMO conference on Engineering Design Optimization Product and Process Improvement, Cork, Ireland (July, 2012), pp.75-82
  9. Daimon Matsui, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Investigation of Nonlinear Decrease of Autofluorescence in Negative Thick-Film Resist
    The 6th IEEE Asia-Pacific Conferenc on Transducers and Micro-Nano Technology (APCOT 2012), Nanjing, China (July, 2012), ac12000168
  10. Hiromasa Yagyu, Yoshikazu Hirai, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Investigation of Molecular Diffusivity of Photoresist Membrane using Coarse-Grained Molecular Dynamics Simulation
    The 26th EUROSENSORS (Eurosensors 2012), Krakow, Poland (September, 2012), pp.402-405, 10.1016/j.proeng.2012.09.168
  11. Floris van Kempen, Yoshikazu Hirai, Fred van Keulen, Osamu Tabata
    Automated Optimization of Gray-Scale Masks for 3D Micro-Structuring
    The 6th European Community on Computational Methods in Applied Sciences and Engineering (ECCOMAS 2012), Vienna, Austria (September, 2012), 2253
  12. Ken-Ichiro Kamei, Yoshikazu Hirai, Yoshihide Makino, Li Liu, Minako Nakajima, Qinghua Yuan, Yong Chen, Osamu Tabata
    Phenotypic Modulation of Pluripotent Stem Cells (PSCs) Induced by Microfabrication Materials
    The 16th International Conference on. Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2012), Okinawa, Japan (October 2012), pp.1063-1065
  13. (Invited) Yoshikazu Hirai
    Material Characterizations of Negative Photoresist for Bio-MEMS Applications
    The 2012 IEEE Nanotechnology Material and Devices Conference (IEEE-NMDC 2012), Honolulu, HI USA (October, 2012), pp.19.

2011

  1. Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Sacrificial Microchannel Sealing by Glass-Frit Reflow for Chip Scale Atomic Magnet Meter
    The 24th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2011), Cancun, Mexico (January, 2011), pp.368-371, 10.1109/MEMSYS.2011.5734438
  2. Akira Taniyama, Yoshikazu Hirai, Koji Sugano, Osamu Tabata, Tsuyoshi Ikehara, Toshiyuki Tsuchiya
    Local Stress Analysis of Single Crystalline Silicon Resonator using Micro Raman Spectroscopy
    The 24th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2011), Cancun, Mexico (January, 2011), pp.449-452, 10.1109/MEMSYS.2011.5734458
  3. Koji Sugano, Akihiro Nakata, Hideaki Yoshimune, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    High-speed Pulsed Mixing with High-frequency Switching of Pumping from Three Inlet Microchannels
    The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2011), Kaohsiung, Taiwan (February, 2011), pp.75-78, 10.1109/NEMS.2011.6017299
  4. Yoshikazu Hirai, Yusuke Nakai, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Epoxy-Based Permeable Membrane Fabrication for 3D Microfluidic Device
    The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2011), Kaohsiung, Taiwan (February, 2011), pp.188-191, 10.1109/NEMS.2011.6017325
  5. Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Equivalent Circuit Analysis of Micromechanical Resonator using Comb Transducer Model with Built-In Displacement Detection
    The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2011), Kaohsiung, Taiwan (February, 2011), pp.1288-1292, 10.1109/NEMS.2011.6017582
  6. Koji Sugano, Hideaki Yoshimune, Akihiro Nakata, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    High-Speed Pulsed Mixing with High-Frequency Switching of Micropump Driving and its Application to Nanoparticle Synthesis
    The 16th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2011), Beijing, China (June, 2011), pp.2570-2573, 10.1109/TRANSDUCERS.2011.5969449
  7. Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Hiromasa Yagyu, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Negative-Photoresist Mechanical Property for Nano-Filtration Membrane Embedded in Microfluidics
    The 16th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2011), Beijing, China (June, 2011), pp.2706-2709, 10.1109/TRANSDUCERS.2011.5969546
  8. Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Hiromasa Yagyu, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Mechanical Characterization of Negative Photoresist by Nano-Indentation for Nano-Filtration Membrane
    The 9th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2011), Hsinchu, Taiwan (June, 2011), pp.62-63.
  9. Koji Sugano, Akihiro Nakata, Hideaki Yoshimune, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    High-Speed Pulsed Mixing with High-Frequency Switching of Pumping from Three Micropumps
    The ASME-JSME-KSME 2011 Joint Fluids Engineering Conference (AJK2011-FED), Hamamatsu, Japan (July, 2011), pp.365-369, 10.1115/AJK2011-36023
  10. Yoshikazu Hirai, Ken-Ichiro Kamei, Yoshihide Makino, Li Liu, Qinghua Yuan, Yong Chen, Osamu Tabata
    mESC and hiPSC Proliferation on Negative Photoresists for Microfluidics
    The 25th EUROSENSORS (EUROSENSORS 2011), Athens, Greece (September, 2011), pp.1233-1236, 10.1016/j.proeng.2011.12.304
  11. Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata
    Self-dependent Equivalent Circuit Modeling of Electrostatic Comb Transducers for Integrated MEMS
    The 19th IFIP/IEEE International Conference on Very Large Scale Integration, Hong Kong (October, 2011), pp.208-213, 10.1109/VLSISoC.2011.6081639
  12. Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Coarse-Grained Molecular Dynamics Simulation of Epoxy-Based Chemically-Amplified Resist for MEMS Application
    The 2011 MRS Fall Meeting, Boston, MA USA (November 2011), MRS Proceedings 2012, Vol. 1415, mrsf11-1415-tt05-14 (6 pages), 10.1557/opl.2012.198

2010

  1. Guillermo Lopez, Osamu Tabata, Masahiro Fujita, Toshiyuki Tsuchiya, Koji Sugano, Yoshikazu Hirai, Takahiro Saeki, Ryo Sato, Tomoki Tanemura, Mizuo Maeda
    DNA-Grafted-Polymer Mediated Self-Assembly of Micro Components
    The 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2010), Xiamen, China (January, 2010), pp.248-252, 10.1109/NEMS.2010.5592199
  2. Ryo Sato, Tomoki Tanemura, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    DNA Mediated Self-Assembly of Micro-Scale Components and Sites
    The 7th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices (FNANO 2010), Snowbird, UT USA (April, 2010), pp.11-12
  3. Taku Wakita, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Tsuyoshi Ikehara
    Crystal Anisotropy on Strength of Single Crystal Silicon Measured by Tensile Testing
    The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2010), Perth, Australia (July, 2010), p.44
  4. Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Component Modeling of 2DOF Comb Transducer for Equivalent Circuit using Built-in Displacement Detection
    The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2010), Perth, Australia (July, 2010), p.160
  5. Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Sacrificial Microchannel Sealing by Glass-Frit Reflow for Micromachined Alkali Gas-Filled Cell
    The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2010), Perth, Australia (July, 2010), p.211
  6. Yoshikazu Hirai, Yusuke Nakai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Embedded Double-Layered Microchannel Fabrication for Microfluidic Devices using Developer Permeability of Negative Thick-Film Resists
    The 24th EUROSENSORS (EUROSENSORS 2010), Linz, Austria (September, 2010), pp.854-857, 10.1016/j.proeng.2010.09.243

2009

  1. Fred van Keulen, Yoshikazu Hirai, Osamu Tabata
    Automated Optimization of Light Dose Distribution for Moving-Mask Lithography
    The 10th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE 2009), Delft, The Netherlands (April, 2009), pp.1-9, 10.1109/ESIME.2009.4938482
  2. Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Parameter Optimization Method for Fabricating 3D Microstructures Embedded in Single-Layer Negative-Tone Photoresist
    The 15th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2009), Denver, CO USA (June, 2009), pp.1616-1619, 10.1109/SENSOR.2009.5285769
  3. Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    3-Dimensional Thick-Resist Microstructuring Adopting Wavelength Dependency of Photoresist Property
    The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2009), Saskatoon, Canada (June, 2009), pp.27-28
  4. Yoshikazu Hirai, Hideaki Yoshimune, Kazuya Tsujimoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Microchannel Embedded in Glass-Frit Layer Bonding for Gas-Filled Sealed Cavity
    The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2009), Saskatoon, Canada (June, 2009), pp.153-154
    【Received the “HARMST 2009 Best Student Presentation Award”】
  5. Pascal Meyer, Sadik Hafizovic, Yoshikazu Hirai, Jan G. Korvink
    Simulation Tool for Deep X-ray Lithography: an Overview
    The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2009), Saskatoon, Canada (June, 2009), pp.175-176
  6. Masashi Sato, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Capacitive Micromachined Ultrasonic Transducers with Novel Membrane Design
    The 23rd EUROSENSORS (EUROSENSORS 2009), Lausanne, Switzerland (September, 2009), pp.389-392, 10.1016/j.proche.2009.07.097
  7. (Invited) Yoshikazu Hirai
    Single-exposure and Single-development Process of Single-layer Negative Photoresist for Low-cost Microfluidic System Fabrication
    The 3rd IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2009), Tainan, Taiwan (October 2009), pp.16

2008

  1. Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Modeling of Positive-Tone Type Thick-Photoresist Dissolution and Sequential Development Profile Simulation
    The 4th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2008), Tainan, Taiwan (June, 2008), 3E1-3
  2. Fred van Keulen, Yoshikazu Hirai, Osamu Tabata
    Objective Function and Adjoint Sensitivities for Moving-Mask Lithography
    The 12th AIAA/ISSMO Multidisciplinary Analysis and Optimization Conference, Victoria, British Columbia Canada (September, 2008), AIAA-2008-5934
  3. Shuji Taue, Sunao Ichihara, Yasuyuki Sugihara, Kiyoshi Ishikawa, Hideyuki Sugioka, Natsuhiko Mizutani, Shujie Liu, Yoshikazu Hirai, Osamu Tabata, Tetsuo Kobayashi
    Measurement of Biomagnetic Fields in Small Animals by use of an Optical Pumping Atomic Magnetometer
    The 16th International Conference on Biomagnetism (Biomag 2008), Sapporo, Japan (August, 2008), No.10-33
  4. Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    3-Dimensional Positive Thick-resist Microstructuring Adopting Wavelength Dependency of Photoresist Property
    The 22nd EUROSENSORS (EUROSENSORS 2008), Dresden, Germany (September, 2008), pp.1559-1602

2007

  1. Yoshiteru Inamoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Moving-mask UV Lithography and Embedded Microchannels
    The 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007), Besancon, France (June, 2007), pp.31-32
  2. Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Moving-Mask UV Lithography for 3-Dimensional Positive- and Negative-Tone Thick Photoresist Microstructuring
    The 14th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2007), Lyon, France (June, 2007), pp.545-548, 10.1109/SENSOR.2007.4300188

2006

  1. Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata
    Prediction Method of 3-D Shape Fabricated by Double Exposure Technique in Deep X-ray Lithography (D2XRL)
    The 19th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2006), Istanbul, Turkey (January, 2006), pp.186-189, 10.1109/MEMSYS.2006.1627767

2005~2003

  1. Yoshikazu Hirai, Naoki Matsuzuka, Osamu Tabata
    Analytical Method for Process Parameters Determination on Double Exposure Deep X-Ray Lithography
    The 6th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2005), Gyeongju, Korea (June, 2005), pp.144-145
  2. Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata
    A New Experimental Technique for Process Parameters Determination on X-ray Lithography
    The 6th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2005), Gyeongju, Korea (June, 2005), pp.146-147
  3. Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata
    A Novel Fabrication Process of 3-D Microstructures by Double Exposure in Standard Deep X-Ray Lithography
    The 17th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2004), Maastricht, The Netherlands (January, 2004), pp.681-684, 10.1109/MEMS.2004.1290676
  4. Sadik Hafizovic, Yoshikazu Hirai, Osamu Tabata, Jan. G. Korvink
    X3D: 3D X-Ray Lithography and Development Simulation for MEMS
    The 12th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2003), Boston, MA USA (June, 2003), pp.1570-1573, 10.1109/SENSOR.2003.1217079
  5. Yoshikazu Hirai, Sadik Hafizovic, Jan G. Korvink, Osamu Tabata
    Measurement of PMMA Dissolution Rate and System Calibration for Predictive 3-D Simulation of Moving Mask Deep X-Ray Lithography
    The 5th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2003), Monterey, CA USA (June, 2003), pp.37-38
  6. Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata, Sadik Hafizovic, Jan G. Korvink
    Effect of Development Process in Moving Mask Deep X-ray Lithography for 3D Microfabrication
    The 5th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2003), Monterey, CA USA (June, 2003), pp.59-60
  7. Yoshikazu Hirai, Sadik Hafizovic, Naoki Matsuzuka, Jan G. Korvink, Osamu Tabata
    3D Simulation System for Moving Mask Deep X-ray Lithography
    The 14th International Symposium on Micromechatronics and Human Science (MHS 2003), Nagoya, Japan (October, 2003), pp.271-276, 10.1109/MHS.2003.1249947