Last Update: August 16, 2024
国際学会
2024
- Ryo Murakami, Shun Kiyose, Yoshikazu Hirai
Smaller Footprint of Alkali-metal Vapor Cells With Microfabricated On-chip Dispensing Component
The 37th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2024), Austin, TX USA (January, 2024), M81-i (Open poster) - Yusuke Asagoe, Hirofumi Shimizu, Yoshikazu Hirai
Microfluidic Device for Diffracted X-ray Tracking Method to Measure the Conformational Change of Ion Channel in Response to Chemical Stimuli
The 19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2024), Kyoto, JAPAN (May, 2024), presented - Haruki Goda, Naoyuki Ishida, Kozo Furuta, Kazuhiko Izui, Fred van Keulen, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata, Yoshikazu Hirai
Topology-Optimized Electrode Design for Accurate TEER Measurements in Microfluidic Organ-on-a-Chip Devices
The Microphysiological Systems World Summit 2024 (MPS World Summit 2024), Seattle, WA USA (June, 2024), 190
ALTEX Proceeding, Vol 12, No. 1 (2024) p.93, 10.58847/ap.2401 - Keita Saikawa, Masaya Zetsu, Taiichi Shikama, Ken-ichiro Kamei, Osamu Tabata, Yoshikazu Hirai
Microfluidic-Assisted Assembly of Fluorescent Nanodiamonds for Precise Temperature Measurement
The EUROSENSORS 2024, Debrecen, Hungury (September 2024), pp.56-57 - Shun Kiyose, Miroku Shimada, Yasushi Hori, Yusuke Odagiri, Satoshi Hatano, Yuichiro Yano, Shigeyoshi Goka, Yoshikazu Hirai, Motoaki Hara
Wafer-Scale Microfabrication for Alkali-Metal Vapor Cells Using Inkjet Printed Rubidium Azide
2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (IEEE UFFC-JS 2024), Taipei, Taiwan (September, 2024), Accepted - Yusuke Asagoe, Hirofumi Shimizu, Yoshikazu Hirai
Diffracted X-Ray Tracking Method for Analyzing the Sequential Dynamic Motion of Ion Channels in Response to a Chemical Stimulus
The 28th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2024), Montreal, Canada (October, 2024), Accepted - Masahiro Inoue, Yuji Nashimoto, Yoshikazu Hirai
Organoid Culture to Characterize Cancer
The 21st International Conference on Flow Dynamics (ICFD2024), Sendai, Japan (November, 2024), Accepted
2023
- (Key note) Osamu Tabata, Ken-ichiro Kamei, Yoshikazu Hirai
Micro Physiological System: A Way to Mimic a Body on a Chip
2023 7th International Conference on Materials Engineering and Nano Sciences (ICMENS 2023), Chiba, JAPAN (April, 2023) - (Invited) Yoshikazu Hirai
Microfabrication Technology for Diffracted X-ray Tracking Method to Observe Ion-Channel Gating Motions
The 3rd MRCE International Conference on: Materials Engineering and Nanotechnology (3rd MRCE- ME&N 2023), Hurghada, EGYPT (April, 2023) - Jiandong Yang, Yoshikazu Hirai, Ken-ichiro Kamei, Osamu Tabata, Toshiyuki Tsuchiya
Simulation Model to Characterize Volumetric Flow Rate Generated by Polydimethylsiloxane Peristaltic Micropump for Body-on-a-Chip
The 18th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2023), Jeju, KOREA (May, 2023), pp. 714-715 - Kentaro Kotoya, Ikkei Yamauchi, Hirofumi Shimizu, Yoshikazu Hirai
Microfluidic-Based Diffracted X-ray Tracking Method for Real-Time Observation of Ion Channel Twist Motion Under Sequential Chemical Stimuli
The 22nd International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2023), Kyoto, JAPAN (June, 2023), pp.757-760, https://ieeexplore.ieee.org/document/10516942 - Haruki Goda, Naoyuki Ishida, Kozo Furuta, Kazuhiko Izui, Fred van Keulen, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata, Yoshikazu Hirai
Electrode Design Using Multi-Material Topology Optimization for Accurate Measurement of Trans-Epithelial Electrical Resistance in Organ-on-a-Chip
The 49th International Conference on Micro- and Nano Engineering (MNE 2023), Berlin, GERMANY (September, 2023), pp. 661-662 - Yusuke Asagoe, Hirofumi Shimizu, Yoshikazu Hirai
Microfluidic-based Diffracted X-ray Tracking Method for Precise Recording of Ion Channel Motion in Response to Sequential Chemical Solution Changes
The 27th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2023), Katowice, POLAND (October, 2023), 4C1-4 - Taiichi Shikama, Takato Watanabe, Masaya Zetsu, Yoshikazu Hirai, Mazin Jouda, Masahiro Hasuo
Accuracy Estimation of All-Optical Thermometry Between 283–373 K using the NV–-Center Zero-Phonon Line Spectrum of Diamond Microparticles
The 2023 MRS Fall Meeting and Exhibit, Boston, MA USA (November, 2023), EL14.12.02
2022
- Takahirio Mizumoto, Yoshikazu Hirai, Amit Banerjee, Toshiyuki Tsuchiya
MEMS Reservoir Computing Using Frequency Modulated Accelerometer
The 35th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2022), Hybrid-Tokyo, JAPAN (January, 2022), pp.487-490, 10.1109/MEMS51670.2022.9699777 - Masaki Shimofuri, Yoshikazu Hirai, Amit Banerjee, Toshiyuki Tsuchiya
Observation of Pull-in by Casimir Force in MEMS-Controlled Nanogap Fabricated by Silicon Cleavage
The 35th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2022), Hybrid-Tokyo, JAPAN (January, 2022), pp.511-514, 10.1109/MEMS51670.2022.9699645 - (Invited) Yoshikazu Hirai
Alkali Metal Vapor Cells Fabricated with Three-Dimensional Microstructuring Technique for Miniature Atomic Clocks
The 17th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2022), Online (April, 2022), pp.20 - Wei Yu, Amit Banerjee, Yoshikazu Hirai, Jun Hirotani, Toshiyuki Tsuchiya
Ultrathin Si NEMS Resonators for Gas Sensing with Ultrahigh Sensitivity
The 17th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2022), Online (April, 2022), pp.72-73 - (Key note) Osamu Tabata, Ken-ichiro Kamei, Yoshikazu Hirai
Micro Physiological System: A Way to Mimic a Body on a Chip
The 9th International Conference on Mechanics, Materials and Manufacturing (ICMMM 2022), Hybrid-Laurel, MD USA (August, 2022)
2021
- Takashi Miyazaki, Jiandong Yang, Satoshi Imamura, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
Highly Accurate Measurement of Trans-Epithelial Electrical Resistance in Organ-on-a-Chip
The 34th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021), Online (January, 2021), pp.411-414, 10.1109/MEMS51782.2021.9375164 - Jiandong Yang, Satoshi Imamura, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
Multilayered Microfluidic Device for Controllable Flow Perfusion of Gut-Liver on a Chip
The 21st International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2021), Online (June, 2021), pp.176-179, 10.1109/Transducers50396.2021.9495477 - Toshiyuki Tsuchiya, Toshiki Ema, Yoshikazu Hirai, Christopher Welham, Hideyuki Maekoba
Gravity and Film Stress Analysis for MEMS Deformable Mirror with Electrostatic Piston Array
The 21st International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2021), Online (June, 2021), pp.483-486, 10.1109/Transducers50396.2021.9495655 - Shun Kiyose, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
Microfabricated Alkali Metal Vapor Cells Filled With an On-Chip Dispensing Component
The 21st International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2021), Online (June, 2021), B6-JI1A1 (*Just-In Press Presentations) - Masaki Shimofuri, Yoshikazu Hirai, Amit Banerjee, Toshiyuki Tsuchiya
SOI-MEMS Device for Fabrication and Physical Properties Measurement of Single-Crystal Silicon Nanogap with (111) Cleavage Plane Surfaces
The 34th International Microprocesses and Nanotechnology Conference (MNC 2021), Online (October, 2021), 29C-3-1
2020
- Tomoya Nakamura, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
Electrostatic Micro Mirror Array with Batch-Fabricated Torsion Beam of Silicon Nanowire
The 33rd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2020), Vancouver, Canada (January 2020), pp.1157-1160, 10.1109/MEMS46641.2020.9056252 - Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya
Scale-Factor Analysis of a Geometrically Compensated (100) Single-Crystal Silicon Vibratory Ring Gyroscope
The 7th IEEE International Symposium on Inertial Sensors and Systems (IEEE INERTIAL 2020), Hiroshima, Japan, (March, 2020), 10.1109/INERTIAL48129.2020.9090073ct - (Invited) Yoshikazu Hirai
Microfluidic Platform Fabricated by Three-Dimensional Lithography Enables Drug Test and Disease Modeling in vitro
The 15th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2020), Online (September, 2020), pp.360 - Dongxiao Zhang, Yoshikazu Hirai, Ken-ichiro Kamei, Osamu Tabata, Toshiyuki Tsuchiya
Heart-Liver on a Chip Integrated with a Microelectrode Array to Monitor Extracellular Field Potentials of Cardiomyocytes
The 24th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2020), Online (October 2020), pp.941-942 - Shun Kiyose, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
Microfabricated Vapor Cells with Monolithically Integrated Alkali Metal Dispensing Component
The 33rd International Microprocesses and Nanotechnology Conference (MNC 2020), Online (Nobember, 2020), 2020-5-8 - Yuanlin Xia, Yoshikazu Hirai, Toshiyuki Tsuchiya
Tensile Strength of Single-Crystal Silicon Microstructure with Stepwise Bias-Graded a-C:H Coating
The 33rd International Microprocesses and Nanotechnology Conference (MNC 2020), Online (Nobember, 2020), 2020-5-22 - Jiandong Yang, Yoshikazu Hirai, Ken-ichiro Kamei, Marika Trumm, Toshiyuki Tsuchiya, Osamu Tabata
In Vitro Modeling of Non-Alcoholic Fatty Liver Disease by Integrated Gut-Liver on a Chip
The 2020 MRS Spring/Fall Meeting and Exhibit, Online (December, 2020), S.SM01.02.02
2019
- Katsuo Nakamura, Yuichi Kimoto, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Microfabrication of Alkali Vapor Cells with Lower the Outgassing and Temperature Utilizing Silicon 3D Structure
The 32nd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2019), Seoul, Korea (January 2019), pp.350-353, 10.1109/MEMSYS.2019.8870676 - Naoki Yamashita, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Surface-Enhanced Raman Spectroscopy with Gold Nanoparticle Dimers Created by Sacrificial DNA Origami Technique
The 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2019), Bangkok, Thailand (April, 2019), pp.322-323 - Yusuke Tsuji, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
Characterization of Ionic Liquid-Based Pressure Sensor Fabricated by Grayscale Lithography
The 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2019), Bangkok, Thailand (April, 2019), pp.409-411 - Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Optimazation of Suspending Beams for Mode-Matching of (100) Single-Crystal Silicon Vibratory Ring Gyroscope
The 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2019), Bangkok, Thailand (April, 2019), SuPo1.11 - Ikkei Yamauchi, Tomoki Tabuchi, Yoshikazu Hirai, Masayuki Iwamoto, Toshiyuki Tsuchiya, Hirofumi Shimizu, Osamu Tabata
Microfabricated Solution Chamber for High Resolution Diffracted X-ray Tracking Method to Observe Ion-Channel Gating Motions
The 20th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2019), Berlin, Germany (June, 2019), pp.25-28, 10.1109/TRANSDUCERS.2019.8808206
【Outstanding Paper Award Finalists (Oral Category)】 - Masaki Shimofuri, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Temperature Difference Measurement Acrorss MEMS Based Nanogap Created by Cleavage of Silicon for Thermionic Generation
The 20th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2019), Berlin, Germany (June, 2019), pp.1483-1486, 10.1109/TRANSDUCERS.2019.8808783 - Yuki Yamazaki, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Parallel Tensile-mode Testing of Single Crystal Silicon By Specimen Integrating Shear Strain Gauge
The 45th International Conference on Micro & Nano Engineering (MNE 2019), Rhodes, Greece (September, 2019), PC133 - Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Vacuum Emission in MEMS Fracture Fabricated, Gap-Controlled Si Nano Electrodes
The 32nd International Microprocesses and Nanotechnology Conference (MNC 2019), Hiroshima, Japan (October, 2019), 31P-8-26 - Jiandong Yang, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
Integrated Gut-Liver on a Chip for Modelling Non-Alcoholic Fatty Liver Disease in vitro
The 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2019), Basel, Switzerland (October 2019), pp.376-377 - (Invited) Yoshikazu Hirai
PDMS-integratable Ionic Liquid-based Pressure Sensor for Microphysiological Systems
The 5th International Conference on Advanced Electromaterials (ICAE 2019), Jeju, Korea (November 2019), 13-0241 - (Invited) Yoshikazu Hirai
Microfabricated Observation Chamber for Diffracted X-ray Tracking Method to Capture Ion-Channel Gating Motion at Time-Lapse Images
The 13th IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2019), Gwangju, Korea (November 2019), SS17.4
2018
- Yoshikazu Hirai, Yusuke Tsuji, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
Improved Sensitivity of Ionic Liquid-Based Pressure Sensor for Body-on-a-Chip using Simulation-Based 3D Lithography
The 31st IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2018), Belfast, United Kingdom (January 2018), pp.511-514, 10.1109/MEMSYS.2018.8346602 - Akiko Uno, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
Zernike Generation with MEMS Deformable Mirror Actuated by Electrostatic Piston Array
The 31st IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2018), Belfast, United Kingdom (January 2018), pp.704-707, 10.1109/MEMSYS.2018.8346652 - Shu Yunyi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Geometrical Compensation of (100) Single-Crystal Silicon Mode-Matched Vibratory Ring Gyroscope
The 5th IEEE International Symposium on Inertial Sensors and Systems (IEEE INERTIAL 2018), Lake Como, Italy (March 2018), P1-14, 10.1109/ISISS.2018.8358156 - Yoshikazu Hirai, Katsuo Nakamura, Yuichi Kimoto, Toshiyuki Tsuchiya, Osamu Tabata
Alkali Metal Dispenser Utilizing Scalloped Silicon Groove for Microfabricated Vapor Cells
The 2018 IEEE International Frequency Control Symposium (IFCS 2018), Olympic Valley, CA USA (May 2018), ThP27, 10.1109/FCS.2018.8597572 - Yoshikazu Hirai, Katsuo Nakamura, Yuichi Kimoto, Toshiyuki Tsuchiya, Osamu Tabata
Low-temperature Alkali Metal Production Utilizing Scalloped Silicon Grooves For Microfabricated Alkali Vapor Cells
The 9th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2018), Hong Kong (June 2018), 94 - Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Vacuum Emission in Large-Area Nanogap Fabricated by MEMS Controlled Cleavage of Single Crystal Silicon
The 31st International Vacuum Nanoelectronics Conference (IVNC 2018), Kyoto, Japan (July 2018), O9-2, 10.1109/IVNC.2018.8520283 - Yoshikazu Hirai, Yasuaki Mori, Tomoki Tabuchi, Hirofumi Shimizu, Toshiyuki Tsuchiya, Osamu Tabata
Microchannel Fabrication using a Photo Patternable Adhesive Material for Recording Conformational Changes of KcsA Channel with the Diffracted X-ray Tracking Method
The EUROSENSORS 2018, Graz, Austria (September 2018), P45, 10.3390/proceedings2130972 - Jiaxu Wu, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
Fluidic-Capacitor Integrated Microfluidic Platform to Mimic Heart Beating for Generation of Functional Liver Organoids
The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2018), Kaohsiung, Taiwan (November 2018), pp.1718-1721 - (Invited) Yoshikazu Hirai
Three Dimensional UV Lithography Technologies for Microphysiological Systems
The 31st International Microprocesses and Nanotechnology Conference (MNC 2018), Sapporo, Japan (November, 2018) - Shu Yunyi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Geometrical Compensation for Mode-Matching of (100) Silicon Ring Resonator for Vibratory Gyroscope
The 31st International Microprocesses and Nanotechnology Conference (MNC 2018), Sapporo, Japan (November, 2018), 14B-3-1 - Wenlei Zhang, Kazutaka Obitani, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Fracture Strength of a Silicon Torsional Mirror Resonator Fully Coated with Submicrometer-Thick PECVD DLC Film
The 31st International Microprocesses and Nanotechnology Conference (MNC 2018), Sapporo, Japan (November, 2018), 15D-4-3 - Masaki Shimofuri, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Non-Contact Temperature Difference Measurement of Cleavage Plane Nanogap Electrodes with Large Surface Area
The 2018 MRS Fall Meeting and Exhibit, Boston, MA USA (November, 2018), TP02.07.04 - Yusuke Tsuji, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
Improvement Performance of Ionic Liquid-Based Pressure Sensor for Integration Into Body-on-a-Chip
The 2018 MRS Fall Meeting and Exhibit, Boston, MA USA (November, 2018), BM05.06.03
2017
- Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Tensile Properties of Single-Crystal-Silicon Fully Coated with Submicrometer-Thick PECVD DLC
The 30th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2017), Las Vegas, NV USA (January 2017), pp.732-735, 10.1109/MEMSYS.2017.7863512 - (Invited) Yoshikazu Hirai, Ken-ichiro Kamei, Osamu Tabata
Body-on-a-Chip: an application of 3-D microstructuring techniques
The 9th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials / The 10th International Conference on Plasma-Nano Technology & Science (ISPlasma 2017 /IC-PLANTS 2017), Nagoya, Japan, (March, 2017), 03aE06I - (Invited) Ken-ichiro Kamei, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Integrated Heart/Cancer on a Chip: Towards Recapitulation of Side Effects
The 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2017), Los Angeles, CA USA (April, 2017). - Naoki Yamashita, Zhipeng Ma, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Formation of Gold Nanoparticle Dimers on Silicon by Sacrificial DNA Origami Technique
The 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2017), Los Angeles, CA USA (April 2017), pp.710-713, 10.1109/NEMS.2017.8017119 - Yoshikazu Hirai, Kenta Terashima, Katsuo Nakamura, Toshiyuki Tsuchiya, Osamu Tabata
Low Temperature, Wafer-Level Process of Alkali-Metal Vapor Cells for Micro-Fabricated Atomic Clocks
The 19th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2017), Kaohsiung, Taiwan (June, 2017), pp.431-434, 10.1109/TRANSDUCERS.2017.7994079 - Toshiyuki Tsuchiya, Yuki Matsui, Yoshikazu Hirai, Osamu Tabata
Thermomechanical Noise of Arrayed Capacitive Accelerometers with 300-nm Gap Sensing Electrodes
The 19th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2017), Kaohsiung, Taiwan (June, 2017), pp.1002-1005, 10.1109/TRANSDUCERS.2017.7994220 - Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
MEMS Based Fabrication of Conformal Electrode Pairs for Thermotunneling Cooling
The 2017 International Meeting for Future of Electron Devices, Kansai (IMFEDK 2017), Kyoto, Japan (June, 2017), pp.106-107, 10.1109/IMFEDK.2017.7998065 - Kenta Terashima, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Microfabrication of Cs-Filled MEMS Cell Using Sequential Plasma Activated Bonding
The 31st European Frequency and Time Forum and the 71st consecutive meeting of the IEEE International Frequency Control Symposium (EFTF-IFCS 2017), Besançon, France (July, 2017), pp.60-62, 10.1109/FCS.2017.8088800 - Tatsuya Omaki, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
Microfabrication of Embedding a Flexible Parylene-Based Microelectrode Array within Body-on-a-Chip
The 31st EUROSENSORS (EUROSENSORS 2017), Paris, France (September, 2017), T-MN-305-1153, 10.3390/proceedings1040302 - Yuto Yamaki, Yuki Sato, Takayuki Yamada, Kazuhiro Izui, Shinji Nishiwaki, Yoshikazu Hirai, Osamu Tabata
Deformable Mirror Design Based on Current Value Optimization and Actuator Reduction
International Conference on Evolutionary and Deterministic Methods for Design Optimization and Control with Applications to Industrial and Societal Problems (EUROGEN 2017), Madrid, Spain (September, 2017), 042 - Toshiyuki Tsuchiya, Yuki Matsui, Yoshikazu Hirai, Osamu Tabata
Bidirectional Hysteresis in Frequency Response of Arrayed Electrostatic MEMS Resonator
The 30th International Microprocesses and Nanotechnology Conference (MNC 2017), Jeju, Korea (November, 2017), 8P-7-84 - Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Tensile Properties of Single Crystal Silicon Microstructure Fully-Coated by Plasma CVD Diamond-Like Carbon with Different Substrate Bias Voltages
The 2017 MRS Fall Meeting and Exhibit, Boston, MA USA (November, 2017), EM06.05.04 - Amit Banerjee, Yasuaki Mori, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
A MEMS Based Approach for Fabricating Conformal Nanogap Electrodes for Thermotunneling Energy Harvesting Applications
The 2017 MRS Fall Meeting and Exhibit, Boston, MA USA (November, 2017), ES09.03.28
2016
- Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Mechanical Stability for the Connections of DNA Origami Using Anti-Parallel/Parallel Double Crossovers
The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (April 2016), A1L-C-5 - Seongsu Park, Zhipeng Ma, Naoki Yamashita, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
A Multibody Brownian Dynamics for Modeling Size-Separation of dsDNA Fragment and DNA Origami Tiles in Anisotropic Nanosieving Array
The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (April 2016), B1L-D-4 - Kanji Yasuda, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Design Optimization of Integrated Shear Strain Gauge for Single-Crystal-Silicon Parallel Tensile-Testing Device
The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (April 2016), B3P-B-53 - Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Electromechanical Fabrication of Conformal Nanogap Electrodes for Thermotunneling Cooling
The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (April 2016), B3P-B-61 - Toshiyuki Tsuchiya, Tetsuya Hemmi, Jun-ya Suzuki, Yoshikazu Hirai, Osamu Tabata
Tensile Fracture of Integrated Single-Crystal Silicon Nanowire using MEMS Electrostatic Testing Device
The 21st European Conference on Fracture (ECF 21), Catania, Italy (June, 2016), 3.1.4, 10.1016/j.prostr.2016.06.178 - Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Effect of Crystallographic Orientations on Fractures and Slip Occurrences at 500 °C of (110) Single Crystal Silicon Microstructures
The 21st European Conference on Fracture (ECF 21), Catania, Italy (June, 2016), 3.1.6, 10.1016/j.prostr.2016.06.179 - Akiko Uno, Vijay Kumar Singh, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Fabrication of MEMS Deformable Mirror Actuated by Electrostatic Piston Array
The 8th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2016), Kanazawa, Japan (June, 2016), pp.113-114 - Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
The 2016 International Conference on Optical MEMS and Nanophotonics (OMN 2016), Singapore (July, 2016), pp.55-56, 10.1109/OMN.2016.7565822 - Kio Tahara, Yoshikazu Hirai, Hirofumi Shimizu, Toshiyuki Tsuchiya, Osamu Tabata
Photoresist Micro-Chamber for the Diffracted X-ray Tracking Method Recording Single-Molecule Conformational Changes
The 30th EUROSENSORS (EUROSENSORS 2016), Budapest, Hungary (September, 2016), WL.FLU-10-8363, 10.1016/j.proeng.2016.11.389 - Katsuo Nakamura, Florian Larramendy, Yoshikazu Hirai, Toshiyuki Tsuchiya, Oliver Paul, Osamu Tabata
Simulation Study of SU-8 Structures Realized by Single-Step Projection Photolithography
The 15th IEEE SENSORS Conference (IEEE SENSORS 2016), Orland, FL USA (October, 2016), pp.139-141, 10.1109/ICSENS.2016.7808444 - (Invited) Ken-ichiro Kamei, Yoshiki Kato, Yoshikazu Hirai, Toshiyuki Tsuchiya, Yong Chen, Osamu Tabata
Integrated Heart/Cancer on a Chip: Towards in vitro recapitulation of side effects of anti-cancer drugs
The 10th IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE NANOMED 2016), Macau SAR, China (October, 2016) - Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Radial Mechanical Property of a Crossover Density-Varied DNA Nanotube
The 29th International Microprocesses and Nanotechnology Conference (MNC 2016), Kyoto, Japan (November, 2016), 9B-2-2 - Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Tensile Test of a Silicon Microstructure Fully Coated with Submicrometer-Thick DLC Film Using PECVD Method
The 29th International Microprocesses and Nanotechnology Conference (MNC 2016), Kyoto, Japan (November, 2016), 9D-2-4 - Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
MEMS Fabricated Conformal Electrodes Attempting Thermotunneling Refrigeration
The 29th International Microprocesses and Nanotechnology Conference (MNC 2016), Kyoto, Japan (November, 2016), 11C-10-5 - Seongsu Park, Sung Hee, Zhipeng Ma, Jongyoon Han, Toshiyuki Tsuchiya, Yoshikazu Hirai, Osamu Tabata
On-Chip Separation of Triangular and Cylindrical DNA Origami Nanostructures Using Slanted Nanofilter Array
The 2016 Annual Meeting of the AES Electrophoresis Society, San Francisco, CA USA (November, 2016), 251s - (Invited) Ken-ichiro Kamei, Yoshiki Kato, Yoshikazu Hirai, Toshiyuki Tsuchiya, Yong Chen, Osamu Tabata
Body on a Chip Towards Understanding of the Side Effects of Anti-Cancer Drug in Vitro
The 29th Annual and International Meeting of Japanese Association for Animal Cell Technology (JAACT), Kobe, Japan (November, 2016) - Yu Nakano, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
Design and Fabrication of Ionic Liquid-Based Pressure Sensor for Evaluation of Vascularization of Micro-Tissues
International Symposium on Micro-Nano Science and Technology 2016 (MNST 2016), Tokyo, Japan (December, 2016), SaA1-B-1 - Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Effect of Tensile Orientation on Slip and Fracture of (110) Silicon at High Temperature
International Symposium on Micro-Nano Science and Technology 2016 (MNST 2016), Tokyo, Japan (December, 2016), SuA1-A-2 - Kanji Yasuda, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Integrated Shear Strain Gauge for Parallel Tensile-Mode Fatigue Testing Device
International Symposium on Micro-Nano Science and Technology 2016 (MNST 2016), Tokyo, Japan (December, 2016), SuA1-A-8
2015
- Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Size Effect on Brittle-Ductile Transition on Temperature of Silicon by Means of Tensile Testing
The 28th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2015), Estoril, Portugal (January, 2015), pp.389-382, 10.1109/MEMSYS.2015.7050971 - Kosuke Hokazono, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
FET Properties of Single-Walled Carbon Nanotubes Individually Assembled utilizing Single Strand DNA
The 28th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2015), Estoril, Portugal (January, 2015), pp.417-420, 10.1109/MEMSYS.2015.7050978 - Xiaoxu Ma, Yoshiki Kato, Yoshikazu Hirai, Floris van Kempen, Fred van Keulen, Toshiyuki Tsuchiya, Osamu Tabata
Optimization Method for 3D Lithography Process Utilizing DMD-Based Maskless Grayscale Photolithography System
Optical Microlithography XXVIII (Conference 9426), SPIE Advanced Lithography 2015, San Jose, CA USA (February, 2015), 9426-14, 10.1117/12.2084486 - Zhipeng Ma, Young-Joo Kim, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Do-Nyum Kim, Osamu Tabata
Direct Characterization of Radial Modulus of DNA Nanotube by AFM Nanoindentation
The 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2015), Xi’an, China (April, 2015), pp.581-584, 10.1109/NEMS.2015.7147496 - Kazuhiro Ban, Kazuya Tsujimoto, Yoshikazu Hirai, Akira Terao, Natsuhiko Mizutani, Tetsuo Kobayashi, Osamu Tabata
Alkali Metal Source Tablet for Vapor Cells of Atomic Magnetometers
The 2015 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCF-EFTF 2015), Denver, CO USA (April, 2015), pp.174-179, 10.1109/FCS.2015.7138817 - Yoto Mori, Zhipeng Ma, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Selective Assembly of DNA Nanostructure Bridging Onto a Trenched Silicon Substrate
The 18th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2015), Anchorage, AK USA (June, 2015), pp.1389-1392, 10.1109/TRANSDUCERS.2015.7181192 - Yoshiki Kato, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
Microfluidic Device to Interconnect Multiple Organs via Fluidic Circulation: Towards Body-on-a-Chip
The 18th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2015), Anchorage, AK USA (June, 2015), pp.1549-1552, 10.1109/TRANSDUCERS.2015.7181233 - Yuki Matsui, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
A Sub-Micron-Gap SOI Capacitive Accelerometer Array utilizing Size Effect
The 18th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2015), Anchorage, AK USA (June, 2015), pp.2212-2215, 10.1109/TRANSDUCERS.2015.7181400 - Xiaoxu Ma, Yoshiki Kato, Floris van Kempen, Yoshikazu Hirai, Toshiyuki Tsuchiya, Fred van Keulen, Osamu Tabata
Multiple Patterning with Process Optimization Method for Maskless DMD-Based Grayscale Lithography
The 29th EUROSENSORS (EUROSENSORS 2015), Freiburg, Germany (September, 2015), pp.1091-1094, 10.1016/j.proeng.2015.08.778 - Tetsuya Henmi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Batch Integration Process of A Free-Standing Silicon Nanowire to MEMS
The 26th Micromechanics and Microsystems Europe workshop (MME 2015), Toledo, Spain (September, 2015), Paper No. B6, p.29 - Zhipeng Ma, Naoki Yamashita, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Programmable Polymerization of DNA Origami Structures with Double Crossovers Connection
The 28th International Microprocesses and Nanotechnology Conference (MNC 2015), Toyama, Japan (November, 2015), 12-P-7-77 - Seongsu Park, Zhipeng Ma, Naoki Yamashita, Kentaro Kawai, D.-N. Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
A Constrained Rigid Body Brownian Dynamics Simulation for On-Chip Size-Separation of Cross-linked DNA Origami Tiles
The 28th International Microprocesses and Nanotechnology Conference (MNC 2015), Toyama, Japan (November, 2015), 13P-11-118L - Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Parallel Tensile-Mode Fatigue Testing of Silicon Microstructures with Integrated Piezoresistive Stain Sensors
The 28th International Microprocesses and Nanotechnology Conference (MNC 2015), Toyama, Japan (November, 2015), 13P-11-124L
2014
- Akio Uesugi, Takahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Brittle-Ductile Transition of Single Crystal Silicon Micro Structure under Tensile Stress Below 600 °C
The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), Daegu, Korea (June, 2014), 3-1 - Xiaoxu Ma, Yoshiki Kato, Yoshikazu Hirai, Floris van Kempen, Fred van Keulen, Toshiyuki Tsuchiya, Osamu Tabata
An Optimization Approach for 3D Photolithography utilizing DMD Maskless Exposure System
The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), Daegu, Korea (June, 2014), 6-1 - Yusuke Kogita, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
Double-Side-Drive Electrostatic Optical Chopper for Time-Resolved Raman Spectroscopy
The 2014 International Conference on Optical MEMS and Nanophotonics (OMN 2014), Glasgow, Scotland (August, 2014), pp.65-66, 10.1109/OMN.2014.6924545 - Toshiyuki Tsuchiya, Vijay Kumar Singh, Yoshikazu Hirai, Osamu Tabata
Large-Displacement Electrostatic Deformable Mirror with Movable Bottom Electrodes
The 2014 International Conference on Optical MEMS and Nanophotonics (OMN 2014), Glasgow, Scotland (August, 2014), pp.119-120, 10.1109/OMN.2014.6924549 - Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata
Photoresist-Based Microfluidic Cell Sorter for Photodynamic Urine Diagnosis
The 28th EUROSENSORS (EUROSENSORS 2014), Brescia, Italy (September, 2014), pp.62-65, 10.1016/j.proeng.2014.11.266 - Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Tensile Testing in Vacuum with Concentrated Infrared Light Heating for Single Crystal Silicon Mechanical Characterization at High Temperature
The 27th International Microprocesses and Nanotechnology Conference (MNC 2014), Fukuoka, Japan (November, 2014), 6C-5-1
2013
- Toshiyuki Akishiba, Naoyuki Tamura, Takashi Ichii, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Hiroyuki Sugimura, Osamu Tabata
DNA Origami Assembly on Patterned Silicon by AFM Based Lithography
The 26th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2013), Taipei, Taiwan (January, 2013), pp.307-310, 10.1109/MEMSYS.2013.6474239
【Recieved the “Outstanding Paper Awards”】 - Atsushi Nakano, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Akira Umeda
Rotational Motion Effect on Sensitivity Matrix of MEMS Three-Axis Accelerometer for Realization of Concurrent Calibration using Vibration Table
The 26th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2013), Taipei, Taiwan (January, 2013), pp.645-648, 10.1109/MEMSYS.2013.6474324 - Yoshiki Kato, Yoshikazu Hirai, Floris van Kempen, Fred van Keulen, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Novel Process Optimization Approach for DMD-based Grayscale 3D Microstructuring Photolithography
The 10th International Workshop on High Aspect Ratio Micro and Nano System Technology (HARMNST 2013), Berlin, Germany (April, 2013), pp.192-193 - Floris van Kempen, Yoshikazu Hirai, Fred van Keulen, Osamu Tabata
Automatic Process Design for 3D Thick-Film Grayscale Photolithography
The 17th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2013), Barcelona, Spain (June, 2013), pp.1625-1628, 10.1109/Transducers.2013.6627095 - Koji Sugano, Hiroshi Katayama, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
SERS Characterization Based on Silver Nanoparticle Dimer in Microfluidic Laminar Flow for Molecule Trace Detection
The 17th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2013), Barcelona, Spain (June, 2013), pp.1807-1810, 10.1109/Transducers.2013.6627140 - Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Effect of Surface Morphology and Crystal Orientations on Fracture Strength of Thin Film (110) Single Crystal Silicon
The 17th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2013), Barcelona, Spain (June, 2013), pp.1946-1949, 10.1109/Transducers.2013.6627175 - Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Fractography Analysis Of Tensile Tested (110) Silicon Prepared by Different Surface Morphology And Crystal Orientations
ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK 2013), Burlingame, CA USA (July, 2013), IPACK2013-73271 - Daisuke Takagi, Yoshikazu Hirai, Satoshi Anai, Yoshitomo Chihara, Kiyohide Fujimoto, Toshiyuki Tsuchiya, Yoshihiko Hirao, Osamu Tabata
Microfluidic Cell Sorter for Photodynamic Urine Diagnosis
The 7th IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2013), Phuket, Thailand (November, 2013), pp.22-26, 10.1109/NANOMED.2013.6766309
2012
- Akio Kitamura, Yoshikazu Hirai, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya
Are Nonliner Resonators Suitable for Energy Harvesting? – Equivalent Circuit Analysis of Nonlinear Response of MEMS Resonator
The 25th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2012), Paris, France (January, 2012), pp.1213-1216, 10.1109/MEMSYS.2012.6170407 - Tatsuya Kataoka, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Tensile Testing of SWCNT using Thermal Actuator Clamped with Electrolessly Deposited Gold Layer
The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (March, 2012), pp.335-336 - Chunmei Huang, Toshiyuki Akishiba, Naoyuki Tamura, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Temperature Dependency of DNA Origami Self-Assembly Rate
The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (March, 2012), pp.411-412 - Ken-Ichiro Kamei, Yoshikazu Hirai, Yoshihide Makino, Li Liu, Qinghua Yuan, Yong Chen, Osamu Tabata
Evaluation of Negative Photoresists on Phenotypes of Human Induced Pluripotent Stem Cells (hiPSCs)
The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (March, 2012), pp.558-559 - So Nishino, Yoshiko Takenaka, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Fabrication of Nanogap Electrodes by Gold Nanorod Growth on Substrate
The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (March, 2012), pp.652-653 - Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Modeling and Elastic Property Simulation of Epoxy-Based Negative Photoresist using Coarse-Grained Molecular Dynamics
The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (March, 2012), pp.999-1000 - Ken-Ichiro Kamei, Yoshikazu Hirai, Yoshihide Makino, Li Liu, Qinghua Yuan, Yong Chen, Osamu Tabata
Phenotypic Modulation of Pluripotent Stem Cells by Microfabrication Materials
The International Society for Stem Cell Research (ISSCR) 10th Annual Meeting, Yokohama, Japan (June, 2012), T-2262 - Floris van Kempen, Yoshikazu Hirai, Fred van Keulen, Osamu Tabata
Optimization Techniques for Gray-Scale Photolithography
The 9th ASMO UK / ISSMO conference on Engineering Design Optimization Product and Process Improvement, Cork, Ireland (July, 2012), pp.75-82 - Daimon Matsui, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Investigation of Nonlinear Decrease of Autofluorescence in Negative Thick-Film Resist
The 6th IEEE Asia-Pacific Conferenc on Transducers and Micro-Nano Technology (APCOT 2012), Nanjing, China (July, 2012), ac12000168 - Hiromasa Yagyu, Yoshikazu Hirai, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Investigation of Molecular Diffusivity of Photoresist Membrane using Coarse-Grained Molecular Dynamics Simulation
The 26th EUROSENSORS (Eurosensors 2012), Krakow, Poland (September, 2012), pp.402-405, 10.1016/j.proeng.2012.09.168 - Floris van Kempen, Yoshikazu Hirai, Fred van Keulen, Osamu Tabata
Automated Optimization of Gray-Scale Masks for 3D Micro-Structuring
The 6th European Community on Computational Methods in Applied Sciences and Engineering (ECCOMAS 2012), Vienna, Austria (September, 2012), 2253 - Ken-Ichiro Kamei, Yoshikazu Hirai, Yoshihide Makino, Li Liu, Minako Nakajima, Qinghua Yuan, Yong Chen, Osamu Tabata
Phenotypic Modulation of Pluripotent Stem Cells (PSCs) Induced by Microfabrication Materials
The 16th International Conference on. Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2012), Okinawa, Japan (October 2012), pp.1063-1065 - (Invited) Yoshikazu Hirai
Material Characterizations of Negative Photoresist for Bio-MEMS Applications
The 2012 IEEE Nanotechnology Material and Devices Conference (IEEE-NMDC 2012), Honolulu, HI USA (October, 2012), pp.19.
2011
- Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Sacrificial Microchannel Sealing by Glass-Frit Reflow for Chip Scale Atomic Magnet Meter
The 24th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2011), Cancun, Mexico (January, 2011), pp.368-371, 10.1109/MEMSYS.2011.5734438 - Akira Taniyama, Yoshikazu Hirai, Koji Sugano, Osamu Tabata, Tsuyoshi Ikehara, Toshiyuki Tsuchiya
Local Stress Analysis of Single Crystalline Silicon Resonator using Micro Raman Spectroscopy
The 24th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2011), Cancun, Mexico (January, 2011), pp.449-452, 10.1109/MEMSYS.2011.5734458 - Koji Sugano, Akihiro Nakata, Hideaki Yoshimune, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
High-speed Pulsed Mixing with High-frequency Switching of Pumping from Three Inlet Microchannels
The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2011), Kaohsiung, Taiwan (February, 2011), pp.75-78, 10.1109/NEMS.2011.6017299 - Yoshikazu Hirai, Yusuke Nakai, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Epoxy-Based Permeable Membrane Fabrication for 3D Microfluidic Device
The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2011), Kaohsiung, Taiwan (February, 2011), pp.188-191, 10.1109/NEMS.2011.6017325 - Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Equivalent Circuit Analysis of Micromechanical Resonator using Comb Transducer Model with Built-In Displacement Detection
The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2011), Kaohsiung, Taiwan (February, 2011), pp.1288-1292, 10.1109/NEMS.2011.6017582 - Koji Sugano, Hideaki Yoshimune, Akihiro Nakata, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
High-Speed Pulsed Mixing with High-Frequency Switching of Micropump Driving and its Application to Nanoparticle Synthesis
The 16th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2011), Beijing, China (June, 2011), pp.2570-2573, 10.1109/TRANSDUCERS.2011.5969449 - Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Hiromasa Yagyu, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Negative-Photoresist Mechanical Property for Nano-Filtration Membrane Embedded in Microfluidics
The 16th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2011), Beijing, China (June, 2011), pp.2706-2709, 10.1109/TRANSDUCERS.2011.5969546 - Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Hiromasa Yagyu, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Mechanical Characterization of Negative Photoresist by Nano-Indentation for Nano-Filtration Membrane
The 9th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2011), Hsinchu, Taiwan (June, 2011), pp.62-63. - Koji Sugano, Akihiro Nakata, Hideaki Yoshimune, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
High-Speed Pulsed Mixing with High-Frequency Switching of Pumping from Three Micropumps
The ASME-JSME-KSME 2011 Joint Fluids Engineering Conference (AJK2011-FED), Hamamatsu, Japan (July, 2011), pp.365-369, 10.1115/AJK2011-36023 - Yoshikazu Hirai, Ken-Ichiro Kamei, Yoshihide Makino, Li Liu, Qinghua Yuan, Yong Chen, Osamu Tabata
mESC and hiPSC Proliferation on Negative Photoresists for Microfluidics
The 25th EUROSENSORS (EUROSENSORS 2011), Athens, Greece (September, 2011), pp.1233-1236, 10.1016/j.proeng.2011.12.304 - Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata
Self-dependent Equivalent Circuit Modeling of Electrostatic Comb Transducers for Integrated MEMS
The 19th IFIP/IEEE International Conference on Very Large Scale Integration, Hong Kong (October, 2011), pp.208-213, 10.1109/VLSISoC.2011.6081639 - Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Coarse-Grained Molecular Dynamics Simulation of Epoxy-Based Chemically-Amplified Resist for MEMS Application
The 2011 MRS Fall Meeting, Boston, MA USA (November 2011), MRS Proceedings 2012, Vol. 1415, mrsf11-1415-tt05-14 (6 pages), 10.1557/opl.2012.198
2010
- Guillermo Lopez, Osamu Tabata, Masahiro Fujita, Toshiyuki Tsuchiya, Koji Sugano, Yoshikazu Hirai, Takahiro Saeki, Ryo Sato, Tomoki Tanemura, Mizuo Maeda
DNA-Grafted-Polymer Mediated Self-Assembly of Micro Components
The 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2010), Xiamen, China (January, 2010), pp.248-252, 10.1109/NEMS.2010.5592199 - Ryo Sato, Tomoki Tanemura, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
DNA Mediated Self-Assembly of Micro-Scale Components and Sites
The 7th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices (FNANO 2010), Snowbird, UT USA (April, 2010), pp.11-12 - Taku Wakita, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Tsuyoshi Ikehara
Crystal Anisotropy on Strength of Single Crystal Silicon Measured by Tensile Testing
The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2010), Perth, Australia (July, 2010), p.44 - Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Component Modeling of 2DOF Comb Transducer for Equivalent Circuit using Built-in Displacement Detection
The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2010), Perth, Australia (July, 2010), p.160 - Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Sacrificial Microchannel Sealing by Glass-Frit Reflow for Micromachined Alkali Gas-Filled Cell
The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2010), Perth, Australia (July, 2010), p.211 - Yoshikazu Hirai, Yusuke Nakai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Embedded Double-Layered Microchannel Fabrication for Microfluidic Devices using Developer Permeability of Negative Thick-Film Resists
The 24th EUROSENSORS (EUROSENSORS 2010), Linz, Austria (September, 2010), pp.854-857, 10.1016/j.proeng.2010.09.243
2009
- Fred van Keulen, Yoshikazu Hirai, Osamu Tabata
Automated Optimization of Light Dose Distribution for Moving-Mask Lithography
The 10th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE 2009), Delft, The Netherlands (April, 2009), pp.1-9, 10.1109/ESIME.2009.4938482 - Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Parameter Optimization Method for Fabricating 3D Microstructures Embedded in Single-Layer Negative-Tone Photoresist
The 15th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2009), Denver, CO USA (June, 2009), pp.1616-1619, 10.1109/SENSOR.2009.5285769 - Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
3-Dimensional Thick-Resist Microstructuring Adopting Wavelength Dependency of Photoresist Property
The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2009), Saskatoon, Canada (June, 2009), pp.27-28 - Yoshikazu Hirai, Hideaki Yoshimune, Kazuya Tsujimoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Microchannel Embedded in Glass-Frit Layer Bonding for Gas-Filled Sealed Cavity
The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2009), Saskatoon, Canada (June, 2009), pp.153-154
【Received the “HARMST 2009 Best Student Presentation Award”】 - Pascal Meyer, Sadik Hafizovic, Yoshikazu Hirai, Jan G. Korvink
Simulation Tool for Deep X-ray Lithography: an Overview
The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2009), Saskatoon, Canada (June, 2009), pp.175-176 - Masashi Sato, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Capacitive Micromachined Ultrasonic Transducers with Novel Membrane Design
The 23rd EUROSENSORS (EUROSENSORS 2009), Lausanne, Switzerland (September, 2009), pp.389-392, 10.1016/j.proche.2009.07.097 - (Invited) Yoshikazu Hirai
Single-exposure and Single-development Process of Single-layer Negative Photoresist for Low-cost Microfluidic System Fabrication
The 3rd IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2009), Tainan, Taiwan (October 2009), pp.16
2008
- Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Modeling of Positive-Tone Type Thick-Photoresist Dissolution and Sequential Development Profile Simulation
The 4th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2008), Tainan, Taiwan (June, 2008), 3E1-3 - Fred van Keulen, Yoshikazu Hirai, Osamu Tabata
Objective Function and Adjoint Sensitivities for Moving-Mask Lithography
The 12th AIAA/ISSMO Multidisciplinary Analysis and Optimization Conference, Victoria, British Columbia Canada (September, 2008), AIAA-2008-5934 - Shuji Taue, Sunao Ichihara, Yasuyuki Sugihara, Kiyoshi Ishikawa, Hideyuki Sugioka, Natsuhiko Mizutani, Shujie Liu, Yoshikazu Hirai, Osamu Tabata, Tetsuo Kobayashi
Measurement of Biomagnetic Fields in Small Animals by use of an Optical Pumping Atomic Magnetometer
The 16th International Conference on Biomagnetism (Biomag 2008), Sapporo, Japan (August, 2008), No.10-33 - Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
3-Dimensional Positive Thick-resist Microstructuring Adopting Wavelength Dependency of Photoresist Property
The 22nd EUROSENSORS (EUROSENSORS 2008), Dresden, Germany (September, 2008), pp.1559-1602
2007
- Yoshiteru Inamoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Moving-mask UV Lithography and Embedded Microchannels
The 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007), Besancon, France (June, 2007), pp.31-32 - Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Moving-Mask UV Lithography for 3-Dimensional Positive- and Negative-Tone Thick Photoresist Microstructuring
The 14th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2007), Lyon, France (June, 2007), pp.545-548, 10.1109/SENSOR.2007.4300188
2006
- Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata
Prediction Method of 3-D Shape Fabricated by Double Exposure Technique in Deep X-ray Lithography (D2XRL)
The 19th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2006), Istanbul, Turkey (January, 2006), pp.186-189, 10.1109/MEMSYS.2006.1627767
2005~2003
- Yoshikazu Hirai, Naoki Matsuzuka, Osamu Tabata
Analytical Method for Process Parameters Determination on Double Exposure Deep X-Ray Lithography
The 6th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2005), Gyeongju, Korea (June, 2005), pp.144-145 - Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata
A New Experimental Technique for Process Parameters Determination on X-ray Lithography
The 6th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2005), Gyeongju, Korea (June, 2005), pp.146-147 - Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata
A Novel Fabrication Process of 3-D Microstructures by Double Exposure in Standard Deep X-Ray Lithography
The 17th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2004), Maastricht, The Netherlands (January, 2004), pp.681-684, 10.1109/MEMS.2004.1290676 - Sadik Hafizovic, Yoshikazu Hirai, Osamu Tabata, Jan. G. Korvink
X3D: 3D X-Ray Lithography and Development Simulation for MEMS
The 12th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2003), Boston, MA USA (June, 2003), pp.1570-1573, 10.1109/SENSOR.2003.1217079 - Yoshikazu Hirai, Sadik Hafizovic, Jan G. Korvink, Osamu Tabata
Measurement of PMMA Dissolution Rate and System Calibration for Predictive 3-D Simulation of Moving Mask Deep X-Ray Lithography
The 5th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2003), Monterey, CA USA (June, 2003), pp.37-38 - Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata, Sadik Hafizovic, Jan G. Korvink
Effect of Development Process in Moving Mask Deep X-ray Lithography for 3D Microfabrication
The 5th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2003), Monterey, CA USA (June, 2003), pp.59-60 - Yoshikazu Hirai, Sadik Hafizovic, Naoki Matsuzuka, Jan G. Korvink, Osamu Tabata
3D Simulation System for Moving Mask Deep X-ray Lithography
The 14th International Symposium on Micromechatronics and Human Science (MHS 2003), Nagoya, Japan (October, 2003), pp.271-276, 10.1109/MHS.2003.1249947