Last Update: April 1, 2024

学術論文：Journal Articles

2024

  1. Takashi MIYAZAKI, Yoshikazu HIRAI
    On-chip Sensing Technique; Measuring Barrier Function of Cell Layer
    The Journal of The Institute of Electrical Engineers of Japan, 144 (2024), pp.202-204, 10.1541/ieejjournal.144.202 (in Japanese)

2023

  1. Dongxiao Zhang, Jiandong Yang, Yoshikazu Hirai, Ken-ichiro Kamei, Osamu Tabata, Toshiyuki Tsuchiya
    Microfabrication of Polydimethylsiloxane–Parylene Hybrid Microelectrode Array Integrated Into a Multi-Organ-on-a-Chip
    Jpn. J. Appl. Phys., 62 (2023), 017002, 10.35848/1347-4065/aca265
  2. Masaki Shimofuri, Amit Banerjee, Jun Hirotani, Yoshikazu Hirai, Toshiyuki Tsuchiya
    Nanometer Order Separation Control of Large Working Area Nanogap Created by Cleavage of Single-Crystal Silicon Along {111} Planes Using a MEMS Device
    J. Microelectromech. Syst., 32 (2023), pp.67-73, 10.1109/JMEMS.2022.3213999
  3. Jiandong Yang, Yoshikazu Hirai, Kei Iida, Shinji Ito, Marika Trumm, Shiho Terada, Risako Sakai, Toshiyuki Tsuchiya, Osamu Tabata, Ken-ichiro Kamei
    Integrated Gut–Liver-on-a-Chip Platform as an in Vitro Human Model of Non-Alcoholic Fatty Liver Disease
    Commun. Biol., 6 (2023), 310, 10.1038/s42003-023-04710-8
  4. (Lecture) Yoshikazu Hirai
    Body on a Chip Development Based on Nano/Microfabrication
    Journal of the Japan Society for Precision Engineering, 89 (2023), pp.690-694, 10.2493/jjspe.89.690 (in Japanese)

2022

  1. Yuanlin Xia, Makoto Suzuki, Peidong Xue, Yoshikazu Hirai, Toshiyuki Tsuchiya
    Effect of Fabrication Process on Fracture Strength and Fatigue Life of Micromirrors Made from Single-Crystal Silicon
    Int. J. Fatigue, 162 (2022), 106983, 10.1016/j.ijfatigue.2022.106983
  2. Jiandong Yang, Satoshi Imamura, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata, Ken-ichiro Kamei
    Gut-Liver-Axis Microphysiological System for Studying Cellular Fluidic Shear Stress and Inter-Tissue Interaction
    Biomicrofluidics, 16 (2022), 044113, 10.1063/5.0088232
    【The cover of BMF’s August 2022 issue】【Selected as Featured article】

2021

  1. Yuanlin Xia, Yoshikazu Hirai, Toshiyuki Tsuchiya
    Fracture behavior of Single-crystal Silicon Microstructure Coated with Stepwise Bias-graded a-C:H Film Surface and Coatings Technology
    Surf. Coat. Technol., 405 (2021), 126559, 10.1016/j.surfcoat.2020.126559
  2. Shun Kiyose, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
    Microfabricated Alkali Metal Vapor Cells Filled With an On-Chip Dispensing Component
    Jpn. J. Appl. Phys., 60 (2021), SCCL01, 10.35848/1347-4065/abe203
  3. Takashi Miyazaki, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    A Design Method of Organ-on-a-Chip with Highly Accurate Measurement of Trans-Epithelial Electrical Resistance
    IEEJ Trans. SM, 141-E (2021), pp.237-244, 10.1541/ieejsmas.141.237 (in Japanese)
  4. Yuanlin Xia, Yoshikazu Hirai, Toshiyuki Tsuchiya
    Effect of Alternating a-C:H Multilayer Full Coating on Fracture Behavior of Single-Crystal Silicon-Based Microstructure in Tensile and Toughness Tests
    Mater. Sci. Eng. A-Struct., 827 (2021), 142054, 10.1016/j.msea.2021.142054

2020

  1. Naoki Yamashita, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Surface-Enhanced Raman Spectroscopy with Gold Nanoparticle Dimers Created by Sacrificial DNA Origami Technique
    Micro Nano Lett., 15 (2020), pp.384-389, 10.1049/mnl.2019.0416
  2. Koki Yoshimoto, Nicolas Minier, Jiandong Yang, Satoshi Imamura, Kaylene Stocking, Janmesh Patel, Shiho Terada, Yoshikazu Hirai, Ken-ichiro Kamei
    Recapitulation of Human Embryonic Heart Beating to Promote Differentiation of Hepatic Endoderm to Hepatoblasts
    Front. Bioeng. Biotechnol., 8 (2020), 568092, 10.3389/fbioe.2020.568092
  3. Takashi Miyazaki, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Design Strategy of Electrode Patterns Based on Finite Element Analysis in Microfluidic Device for Trans-Epithelial Electrical Resistance (TEER) Measurement
    IEEJ Trans. SM, 140-E (2020), pp.285-292, 10.1541/ieejsmas.140.285 (in Japanese)
    Translated to Electr. Commun. Jpn., 104 (2021), e12296, 10.1002/ecj.12296

2019

  1. Wenlei Zhang, Kazutaka Obitani, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Fracture Strength of Silicon Torsional Mirror Resonators Fully Coated with Submicrometer-Thick PECVD DLC Film
    Sens. Actuator A-Phys., 286 (2019), pp.28-34, 10.1016/j.sna.2018.12.021
  2. Naoki Yamashita, Seongsu Park, Zhipeng Ma, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Specific Binding of DNA Origami on a Nanoscale Pattern Formed by AFM Lithography
    IEEJ Trans. SM, 139-E (2019), pp.95-102, 10.1541/ieejsmas.139.95 (in Japanese)
  3. Shimofuri Masaki, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Temperature Difference Measurement between Nanogap Fabricated by Cleavage of Single Crystal Silicon Using Raman Microscopy
    Journal of JSEM, 19 (2019), pp.24-29, 10.11395/jjsem.19.13 (in Japanese)
  4. Toshiyuki Tsuchiya, Junya Suzuki, Tatsuya Kataoka, Yoshikazu Hirai, Koji Sugano, Osamu Tabata
    Strain Measurement of Single-Walled Carbon Nanotube Using Micro Raman Spectroscopy on MEMS Tensile Testing
    Journal of JSEM, 19 (2019), pp.24-29, 10.11395/jjsem.19.24 (in Japanese)
  5. Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Geometrical Compensation for Mode-Matching of (100) Silicon Ring Resonator for Vibratory Gyroscope
    Jpn. J. Appl. Phys., 58 (2019), SDDL06, 10.7567/1347-4065/ab0dee
  6. Jiaxu Wu, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Novel Microfluidic Device Integrated with a Fluidic-Capacitor to Mimic Heart Beating for Generation of Functional Liver Organoids
    IEEJ Trans. SM, 139-E (2019), pp.209-216, 10.1541/ieejsmas.139.209 (in Japanese)
    Translated to Electr. Commun. Jpn., 102 (2019), pp.41-49, 10.1002/ecj.12210

2018

  1. Yusuke Shiomi, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
    High-Yield Bridged Assembly of ssDNA-Modified SWCNT Using Dielectrophoresis
    International Journal of Automation Technology, 12 (2018), pp.29-36, 10.20965/ijat.2018.p0029
  2. Zhipeng Ma, Yunfei Huang, Seongsu Park, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Hirofumi Yamada, Osamu Tabata
    Rhombic-Shaped Nanostructures and Mechanical Properties of 2D DNA Origami Constructed with Different Crossover/Nick Designs
    Small, 14 (2018), 1702028, 10.1002/smll.201702028
  3. Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Mathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array
    IEEJ Trans. SM, 138-E (2018), pp.66-73, 10.1541/ieejsmas.138.66 (in Japanese)
    Translated to Electr. Eng. Jpn., 204 (2018), pp.50-60, 10.1002/eej.23104
  4. Wenlei Zhang, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Effect of Substrate Bias Voltage on Tensile Properties of Single Crystal Silicon Microstructure Fully Coated with Plasma CVD Diamond-Like Carbon Film
    Appl. Surf. Sci., 443 (2018), pp.48-54, 10.1016/j.apsusc.2018.02.179
  5. Tatsuya Inagaki, Seongsu Park, Naoki Yamashita, Zhipeng Ma, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Revealing the Influential Factor on Dimerizing of Triangular DNA Origami by Linker
    IEEJ Trans. SM, 138-E (2018), pp.171-177, 10.1541/ieejsmas.138.171 (in Japanese)
  6. Toshiyuki Tsuchiya, Tetsuya Hemmi, Jun-ya Suzuki, Yoshikazu Hirai, Osamu Tabata,
    Tensile Strength of Silicon Nanowires Batch-Fabricated into Electrostatic MEMS Testing Device
    Appl. Sci., 8 (2018), 880, 10.3390/app8060880
  7. Yuto Yamaki, Yuki Sato, Kazuhiro Izui, Takayuki Yamada, Shinji Nishiwaki, Yoshikazu Hirai, Osamu Tabata
    A Heuristic Approach for Actuator Layout Designs in Deformable Mirror Devices Based on Current Value Optimization
    Struct. Multidisc. Optim., 58 (2018), pp.1243-1254, 10.1007/s00158-018-1968-5
  8. Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Parallel Tensile Testing of Single-crystal Silicon Microstructures with Integrated Piezoresistive Strain Gauges
    Sens. Mater., 30 (2018), pp.2143-2157, 10.18494/SAM.2018.1946

2017

  1. Zhipeng Ma, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Tuning Porosity and Radial Mechanical Properties of DNA Origami Nanotubes via Crossover Design
    Jpn. J. Appl. Phys., 56 (2017), 06GJ02, 10.7567/JJAP.56.06GJ02
  2. Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Tensile Test of a Silicon Microstructure Fully Coated with Submicrometer-Thick DLC Film Using PECVD Method
    Jpn. J. Appl. Phys., 56 (2017), 06GN01, 10.7567/JJAP.56.06GN01
  3. Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Measurement and Potential Barrier Evolution Analysis of Cold Field Emission in Fracture Fabricated Si Nanogap
    Jpn. J. Appl. Phys., 56 (2017), 06GF06, 10.7567/JJAP.56.06GF06
  4. (Review) Yoshikazu Hirai
    Cutting Edge of MEMS Research and Development in 2017
    Journal of The Surface Finishing Society of Japan, 68 (2017), pp.360-366, 10.4139/sfj.68.360 (in Japanese)
  5. Ken-ichiro Kamei, Yoshiki Kato, Yoshikazu Hirai, Shinji Ito, Junko Satoh, Atsuko Oka, Toshiyuki Tsuchiya, Yong Chen, Osamu Tabata,
    Integrated Heart/Cancer on a Chip to Reproduce the Side Effects of Anti-Cancer Drugs in vitro
    RSC Adv., 7 (2017), pp.36777-36786, 10.1039/C7RA07716E
  6. Naoki Yamashita, Zhipeng Ma, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Formation of Gold Nanoparticle Dimers on Silicon by Sacrificial DNA Origami Technique
    Micro Nano Lett., 12 (2017), pp.854-859, 10.1049/mnl.2017.0426

2016

  1. Toshiyuki Tsuchiya, Yusuke Kogita, Akira Taniyama, Yoshikazu Hirai, Koji Sugano, Osamu Tabata
    Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper
    J. Microelectromech. Syst., 25 (2016), pp.188-196, 10.1109/JMEMS.2015.2503723
  2. Yoshiki Kato, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Development of a Body-on-a-Chip Using 3-D Microstructuring Technique
    IEEJ Trans. SM, 136 (2016), pp.229-236, 10.1541/ieejsmas.136.229 (in Japanese)
    【電気学会 第73回電気学術振興賞 論文賞】
  3. Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Constructing Higher Order DNA Origami Arrays using DNA Junctions of Anti-Parallel/Parallel Double Crossovers
    Jpn. J. Appl. Phys., 55 (2016), 06GL04, 10.7567/JJAP.55.06GL04
  4. Zhipeng Ma, Seongsu Park, Naoki Yamashita, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Investigation of the Self-Assembly Process for Discrete and Polymerized Bivalve DNA Origami Structures
    IEEJ Trans., 11 (2016), pp.S164-S170, 10.1002/tee.22249
  5. Kazuhiro Ban, Yoshikazu Hirai, Kazuya Tsujimoto, Akira Terao, Natsuhiko Mizutani, Tetsuo Kobayashi, Osamu Tabata
    Characterization of Alkali-Metal Vapor Cells Fabricated with an Alkali-Metal Source Tablet
    J. Vac. Sci. Technol. A, 34 (2016), 061601, 10.1116/1.4963108

2015

  1. Akio Uesugi, Takahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    High-Temperature Tensile Testing Machine for Investigation of Brittle-Ductile Transition Behavior of Single Crystal Silicon Microstructure
    Jpn. J. Appl. Phys., 54 (2015), 06FP04, 10.7567/JJAP.54.06FP04
  2. Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata
    ALA-Induced Fluorescence Detection with Photoresist-Based Microfluidic Cell Sorter for Bladder Cancer Diagnosis
    Sens. Actuator B-Chem., 213 (2015), pp.547-557, 10.1016/j.snb.2015.01.118
  3. Zhipeng Ma, Young-Joo Kim, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Do-Nyum Kim, Osamu Tabata
    Direct Measurement of Transversely Isotropic DNA Nanotube by Force-Distance Curve-Based Atomic Force Microscopy
    Micro Nano Lett., 10 (2015), pp.513-517, 10.1049/mnl.2015.0174
  4. Xiaoxu Ma, Yoshiki Kato, Floris van Kempen, Yoshikazu Hirai, Toshiyuki Tsuchiya, Fred van Keulen, Osamu Tabata
    Experimental Study of Numerical Optimization for 3-D Microstructuring using DMD-Based Grayscale Lithography
    J. Microelectromech. Syst., 24 (2015), pp.1856-1867, 10.1109/JMEMS.2015.2447548
  5. Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Effect of Crystallographic Orientation on Tensile Fractures of (100) and (110) Silicon Microstructures Fabricated from SOI Wafers
    Micro Nano Lett., 10 (2015), pp.678-682, 10.1049/mnl.2015.0334

2014

  1. Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Analytical Investigation of the Feasibility of Sacrificial Microchannel Sealing for Chip-Scale Atomic Magnetometers
    Microsyst. Technol., 20 (2014), pp.357-365, 10.1007/s00542-013-1895-8

2013

  1. (Review) Ken-ichiro Kamei, Yoshikazu Hirai, Osamu Tabata
    Body on a Chip: Re-Creation of a Living System In Vitro
    IEEE Nanotechnology Magazine, 7 (2013), pp.6-14, 10.1109/MNANO.2013.2275024
  2. Ken-ichiro Kamei, Yoshikazu Hirai, Momoko Yoshioka, Yoshihide Makino, Qinghua Yuan, Minako Nakajima, Yong Chen, Osamu Tabata
    Phenotypic and Transcriptional Modulation of Human Pluripotent Stem Cells Induced by Nano/Microfabrication Materials
    Adv. Healthcare Mater., 2 (2013), pp.287-291, 10.1002/adhm.201200283
    【Selected as Inside Front Cover】
  3. Yoshikazu Hirai, Hiromasa Yagyu, Yoshihide Makino, Akio Uesugi, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Molecular Level Study of Negative Thick-Film Resist in MEMS by Employing a Coarse-Grained Molecular Dynamics Simulation
    IEEJ Trans. SM, 133 (2013), pp.320-329, 10.1541/ieejsmas.133.320 (in Japanese)
  4. Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Effect of Surface Morphology and Crystal Orientations on Tensile Fracture Property of (110) Single Crystal Silicon
    Trans. JSME, A, 79 (2013), pp.1191-1200, 10.1299/kikaia.79.1191 (in Japanese)
  5. Kazuya Tsujimoto, Kazuhiro Ban, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Natsuhiko Mizutani, Osamu Tabata
    On-Chip Fabrication of Alkali-Metal Vapor Cells utilizing an Alkali-Metal Source Tablet
    J. Micromech. Microeng., 23 (2013), 115003, 10.1088/0960-1317/23/11/115003t

2012

  1. Tatsuya Kataoka, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Mechanical and Electrical Clamping of DEP Assembled SWCNT Using Electroless Gold Deposition
    IEEJ Trans. SM, 132 (2012), pp.108-113, 10.1541/ieejsmas.132.108 (in Japanese)
  2. Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Tensile Test on (110) Thin Film Single Crystal Silicon with Different Processing Conditions
    IEEJ Trans. SM, 132 (2012), pp.320-321, 10.1541/ieejsmas.132.320 (in Japanese)
  3. Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Simulation of Mechanical Properties of Epoxy-Based Chemically Amplified Resist by Coarse-Grained Molecular Dynamics
    Polymer, 53 (2012), pp.4834-4842, 10.1016/j.polymer.2012.08.050

2011

  1. Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Sacrificial Microchannel Sealing by Glass-Frit Reflow for Chip Scale Atomic Magnetometer
    IEEJ Trans. SM, 131 (2011), pp.251-257, 10.1541/ieejsmas.131.251 (in Japanese)
    Translated to Electr. Commun. Jpn., 96 (2013), pp.58-66, 10.1002/ecj.10432

2010

  1. Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    A Three-Dimensional Microstructuring Technique Exploiting the Positive Photoresist Property
    J. Micromech. Microeng., 20 (2010), 065005, 10.1088/0960-1317/20/6/065005
  2. Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Component Modeling of 2DOF Comb Transducer for Equivalent Circuit using Built-In Displacement Detection
    IEEJ Trans. SM, 130 (2010), pp.443-449, 10.1541/ieejsmas.130.443 (in Japanese)
  3. Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Embedded Microstructure Fabrication using Developer-Permeability of Semi-Cross-Linked Negative Resist
    J. Microelectromech. Syst., 19 (2010), pp.1058-1069, 10.1109/JMEMS.2010.2067202

2003-2007

  1. Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Moving Mask UV Lithography for Three-Dimensional Structuring
    J. Micromech. Microeng., 17 (2007), pp.199-206, 10.1088/0960-1317/17/2/003
  2. Yoshikazu Hirai, Sadik Hafizovic, Naoki Matsuzuka, Jan G. Korvink, Osamu Tabata
    Validation of X-ray Lithography and Development Simulation System for Moving Mask Deep X-ray Lithography
    J. Microelectromech. Syst., 15 (2006), pp.159-168, 10.1109/JMEMS.2005.859191
  3. Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata
    A Novel Fabrication Process of 3D Microstructures by Double Exposure in Deep X-ray Lithography (D2XRL)
    J. Micromech. Microeng., 15 (2005), pp.2056-2062, 10.1088/0960-1317/15/11/009
  4. Yoshikazu Hirai, Sadik Hafizovic, Jan G. Korvink, Osamu Tabata
    Process Simulation System for 3D X-ray Lithography and Development
    IEEJ Trans. SM, 123 (2003), pp.368-375, 10.1541/ieejsmas.123.368 (in Japanese)